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Elastomer Sealed Thermal Gas Mass Flow Controllers & Meters

Proven flexibility for a wide range of industrial applications.

Our elastomer sealed thermal mass flow meters and gas flow controllers combine the accuracy, reliability and repeatability your industrial processes require.

As the global leader in precision fluid measurement and control, mass flow meter manufacturer Brooks Instrument constantly invests to innovate and improve thermal mass flow technology. Today more than ever, industrial operations seek to precisely measure gas flow — from the feedline through the processing systems — then use that information in real time to keep the process precisely on target and productive.

Our broad family of elastomer sealed thermal mass flow meters and gas flow controllers are accurate, reliable instruments that deliver precise performance and long-term stability. The result: You will maximize the value and return on investment your operations require.

Our elastomer sealed mass flow controllers (MFCs) and meters feature:

  • Widest flow and pressure ranges
  • Superior long-term drift stability that delivers sustained value
  • Mass flow meters and controllers engineered and approved for hazardous areas
  • Hose-down/wash-down enclosure options for thermal gas flow meters and controllers

Current Key Applications

With gas flow controllers installed in industrial, semiconductor and other high-technology operations across the globe, Brooks Instrument works closely with leading manufacturers to refine and enhance how our gas flow measurement and control technology delivers precise, accurate, repeatable results.

  • Chemical and petrochemical analysis and pilot processes: Pilot plants reduce the technical and commercial risk associated with large process plants by providing valuable data about reactions, material properties, process yields and more. In a pilot plant, our thermal mass flow controllers monitor the gas flow rate and pressure input to a reactor and the flow output, providing critical data and direction on how to proceed. Learn more
  • Life sciences bioreactors: Our elastomer sealed thermal mass flow meters and gas flow controllers include the SLA Series Biotech MFCs engineered specifically for bioprocessing applications. They offer greater recipe flexibility for bioreactors and fermenters via four pre-calibrated multi-gas pages. This video provides a complete background on these innovative mass flow controllers. Watch our video
  • Thin film vapor deposition: Many glass manufacturers apply special coatings to control the flow of light energy through the glass and keep energy costs down. They need stable, reliable gas flow measurement and control in their thin film vapor deposition systems. Discover how SLA Series gas mass flow controllers deliver a uniform and accurate amount of process gasses to these systems to maximize system productivity and quality. Learn more
  • Laboratory and analytical systems
  • Heat treating, cutting and other thermal processes
  • Vacuum applications
Select the thermal mass flow meter and controller that best serves your process requirements.

PRODUCTS

SLA Series
SLA Series
GF40 Series
GF40 Series
5850E Series
5850E Series
SLAMf Series
SLAMf Series
4800 Series
4800 Series
5700 Series
5700 Series
Product Type Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Meter
Differentiator

Wide Flow & Pressure Range

Superior Long-term Stability

High Accuracy

High Accuracy

MultiFlo™ Capability

Compact Size

Suitable for Full Suite of Gases

Proven Reliable Performance

Long Term Stability

Easy to Change Range and Recalibrate in the Field

NEMA 4X/IP66 Approved Enclosure

Perfect for Hose Down/Wash Down Applications

Hazardous Area Approvals

 

Ultra-fast Response Times

Optional Local Operator Interface

Compact Size

Suitable for Non-corrosive Gases

Economical

Compact

Ideal Upgrade from Volumetric Devices

Flow Range (Full Scale Capacity) .003 - 2500 slpm 3 sccm - 50 slpm

0 - 1000 slpm

.003 - 2500 slpm 50 sccm - 40 slpm

0  - 50 slpm

Seal Material Elastomer Seal Elastomer Seal Elastomer Seal Elastomer Seal Elastomer Seal

Stainless Steel

Max Pressure

.003-200 slpm: 1500 psi/103 bar

100 - 2500 slpm: 1000 psi/70 bar

Optional 4500 psi/310 bar on 50 slpm max device

150 psig/10 bar

Controllers: 1500 psig

Meters: up to 4500 psig on some models

Up to 100 lpm: 1500 psi/100 bar

Up to 50 lpm: 4500psi/310 bar (optional)

100-2500 lpm:  1000 psi/70 bar

150 psig/10 barg

150 psig

Accuracy

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20-100% FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS


Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20-100% FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

1% of SP 35-100%, 0.35% of FS 2-35%

1% of FS

1.5% of FS > 20 slpm

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20-100% FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS


Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20-100% FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

3.0% of FS

1.0% of FS (optional)

5% of FS including linearity

Repeatability

0.20% SP

0.20% SP

0.25% of Rate

0.20% SP

0.15% FS

0.50% FS

Multi-Gas & Range Configurability

Standard

MultiFlo™ Available

Standard

Diagnostic Capability Available

Available

Available

Available

Analog Communication

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

0-5 V, 0-10 V
0-20 mA, 4-20 mA

0-5 Vdc

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

0-5 Vdc
4-20 mA

0-5 V into 1000 ohms or greater

Digital Communication DeviceNet™
EtherCAT®
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485 

DeviceNetTM
EtherCAT®
Profibus®
RS485


DeviceNet™
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485 
RS232


Size Medium Compact Large

Compact

Compact

Certifications/Approvals

ISO/IEC 17025:2005
CE: EMC Directive 2014/30/EU
Directive 2011/65/EU

UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22

ATEX: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 G Ex nA IIC T4 Gc

KOSHA: Ex nA IIC T4

CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Safety EN61010-1

ISO/IEC 17025:2005

CE: EMC, RoHs, PED

UL Listed/Recognized:

Class 1, Div 2, Group A,B,C,D

Class 1, Zone 2, IIC T4, Class II, Zone 22

ATEX:

II 3 G Ex nA IIC T4 Gc 

II 3 D Ex tc IIIC T 85°C Dc

IECEx:

Ex nA IIC T4 Gc 

Ex tc IIIC T 85°C Dc 

KOSHA:

Ex nA IIC T4

Ex tc IIIC T85°C Dc

ATEX Zone 2

CSA Div 2/Zone 2 (Recognized)