Capacitance Manometers
Every vacuum pressure gauge and chamber process has a precise Torr level it must reach to sustain process yields. With industry-leading advanced sensor design features, capacitance manometers from Brooks Instrument are designed to improve manometer measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects. And because these vacuum pressure gauges are fully digital devices, Brooks capacitance manometers operate over a wide dynamic range with extremely good accuracy. The result is an exceptionally reliable family of manometers and vacuum pressure gauges for all vacuum measurement applications.
KEY APPLICATIONS
- Semiconductor fabrication
- Thin-film deposition processes – glass, web and optical coatings
- Freeze drying perishable materials
- High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)
Select the capacitance manometer that best meets your project requirements.
PRODUCTS
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| Product Type | Capacitance Manometer | Capacitance Manometer |
| Differentiator |
Unheated
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Heated or Unheated Analog or Digital
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| Pressure Range |
10, 20, 50, 100 and 1000 Torr Full Scale |
0.1, 1, 2, 10, 20, 100, 1000 Torr mBar & Pascal References Available |
| Accuracy |
Type A = 0.25% of Reading Type B = 0.50% of Reading |
CMX0: 0.25% of Reading CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading |
| Temperature | Ambient |
CMX0 Ambient CMX1 45°C CMX2 100°C CMX3 160°C |
| Analog Communication |
0-10 Vdc (<10k Ohm load) |
0-10 Vdc 5k Ohm load |
| Digital Communication |
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DeviceNet™ RS485 |
| Size | Compact | Large |