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Pressure & Vacuum Products
Accessories & Software Cables, Filters, Valves, Secondary Electronics, Software
Mass Flow Controllers & Meters
Vaporization Products
Variable Area Flow Meters (Rotameters)
Semiconductor Products Ultra-high purity products for the semiconductor industry
Optimize Bioprocess Performance
Thru Intelligent Gas Management
MT3809 Metal Tube Flowmeter
GP200 for Etch & CVD Processes
for Load Lock Applications
Dr. Mohamed Saleem, CTO
Ensures Consistent Flow During Initial Recipe Step
Brooks Instrument is more than a flow meter manufacturer. As the leading supplier of flow technology, we offer the world’s most comprehensive line of precision flow control and flow measurement devices. Explore high-performance instruments, from mass flow controllers to rotameters, supported by expertise and service only found at Brooks Instrument.
Quickly find products and documentation by name or model number.
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NEW! Fast delivery of select variable area flow meters.
Get Factory Certified Service or field support to calibrate and repair your instrument.
Our applications engineers are ready to help solve your measurement and control challenges.
1-888-554-3569