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Products Pressure & Vacuum Capacitance Manometers CMC Series
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CMC Series Capacitance Manometers

Compact, proven unheated gauges for cost-effective vacuum measurement.
Models CMC

CMC Series capacitance manometers from Brooks Instrument deliver reliable, accurate vacuum measurement over a wide range of operating temperatures, providing an economical alternative to larger premium unheated gauges. Its compact design and proven performance make it an ideal upgrade for existing tools needing a small form-factor gauge.

Reliable and repeatable operation is assured in even the most aggressive processes through the all-welded design and Iconel® wetted surfaces. The combination of precision components and a wide temperature compensated operating range lets Brooks deliver best-in-class zero and span temperature coefficients for optimum measurement stability. 

Questions?

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CMC Series Data Sheet

Features

  • Available for process ranges from 10 Torr to 1000 Torr
  • Two accuracy levels available: 0.25% or 0.50% of reading (optional)
  • Exceptional performance over a wide range of operating temperatures
  • 40% smaller than traditional unheated capacitance manometers
  • All-welded construction and Inconel® wetted surfaces

Benefits

  • Optional high accuracy calibration matches the accuracy of more costly premium unheated manometers
  • Best-in-class zero and span temperature coefficients
  • Space-saving design helps fit device into tight machine spaces
  • Optimum measurement repeatability compared to other designs that are prone to error inducing internal stresses

Applications

  • Semiconductor fabrication
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)
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Product Type
Capacitance Manometer
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Differentiator

Unheated

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Performance
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Temperature
Ambient
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Pressure Range

10, 20, 50, 100 and 1000 Torr Full Scale

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Accuracy

Type A = 0.25% of Reading

Type B = 0.50% of Reading

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Measurement Range
4 Decades
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Temperature Effect

On Zero

0.002% FS / °C

 

On Span

0.027% FS / °C

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Mechanical
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Exposed Materials
Inconel
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Over Pressure Limit
45 psia
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Electrical
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Analogue Communication

0-10 Vdc (<10k Ohm load)

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Digital Communication

—

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Electrical Connection

15-Pin DSub on 6” cable

9-Pin DSub

5-Pin terminal strip

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Power Supply / Consumption
< 200 mW
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Certifications/Approvals
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EMC

CE

Directive 89/336/EEC

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Environmental Compliance

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

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Size
Compact
CMC
Temperature Ambient
Pressure Range 10, 20, 50, 100 and 1000 Torr Full Scale
Accuracy

±0.25% of reading

±0.50% of reading (optional)
Analogue Communication 0 - 10 Vdc
Digital Communication —
Filename File Type Documents By Language
Data Sheet pdf English
Installation & Operation Manual pdf English
CE EU Declaration of Conformity Certificate pdf English Korean Romanian Russian Spanish