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Products Pressure & Vacuum Pirani Transducers VersaTorr BVT200 Series
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VersaTorr BVT200 Series Pirani Transducers

Ultra-wide range pirani/capacitance/piezo transducer with atmospheric switch function.

Establish new standards with the VersaTorr BVT200/225 Series Pirani transducer. This is an all-in-one wide range measurement solution for a broad selection of vacuum applications. It differentiates from any other vacuum gauges by offering an overall cost-effective gas independent measurement from 5.0E-3 to 1333 mbar in combination with measurement down to 1E-6 mbar by use of the heat-loss principle.

In vacuum applications where the gas composition or type can change, traditional gas dependent Pirani gauges will result in measurement deviation from the actual pressure. The Tri- Sensor transducer uses a precision capacitance diaphragm gauge (CDG) sensor that eliminates the gas dependency and provides accurate measurements also when the gas properties change.

The integrated heat-loss MEMS Pirani sensor extends the measuring range down to 1E-6 mbar and provides a novel automatic zero adjustment of the capacitance manometer that eliminates the common needs for manual zero adjustment of traditional capacitance diaphragm gauges.

Questions?

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BVT200 Series Data Sheet

Features & Benefits

  • Ultra-wide measuring range of 9 decades
  • Capacitance diaphragm adds increased accuracy at 0.5% through low vacuum range
  • 6 decades of gas independent measurement from 5E-3 to 1333 mbar
  • Automatic zeroing of capacitance manometer
  • Vacuum temperature sensor for diagnostics

Applications

  • Load locks
  • Transfer chambers
  • Forelines
  • Vacuum roughing lines
  • Thin film processing
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Product Type
Tri Sensor: MEMS Pirani, Capacitance & Piezo Diaphragms
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Differentiator

Capacitance and Piezo diaphragm sensors provide extended high-accuracy direct vacuum measurement for process control

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Performance
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Temperature
Ambient - 50 oC
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Pressure Range

7.5x10-7 Torr through 1000 Torr

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Accuracy

7.5x10-5 to7.49x10-3 Torr: ±5%

7.5x10-3 to7.49 Torr: ±0.5%

7.50 to 7.49 Torr: ±0.5%

75 Torr to 1000 Torr: ≤±0.5%

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Measurement Range
9 Decades
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Temperature Effect

Ambient - 50 oC

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Mechanical
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Exposed Materials
304 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton®, low out-gassing epoxy resin, solder, RO4305
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Over Pressure Limit
4 bar absolute
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Electrical
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Analogue Communication

0.5-9.5 Vdc (1V per decade)

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Digital Communication

RS-232

RS-485

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Electrical Connection

9 Pin D-sub male: BVT120 Series only

15 pin HD D-sub male

15 pin HD D-Sub male / dual analog out

6 pin Hirschmann, ID res 3K: BVT120 Series only

6 pin Hirschmann, ID res 5.1K: BVT120 Series only

6 pin Hirschmann, ID res 9.1K/11.1K: BVT120 Series only

8 pin RJ45 / FCC68, ID Res 27K: BVT120 Series only

8 pin RJ45 / FCC68, ID Res 36K: BVT120 Series only

8 pin RJ45 / FCC68, ID Res 43K: BVT120 Series only

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Power Supply / Consumption
350 mW (max)
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Certifications/Approvals
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EMC
Directive EU 2015/863 EMC directive 2014/30/EU
Filename File Type Documents By Language
Data Sheet - BVT200/225 pdf English
Data Sheet - BVT275 pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: CMX - 0 - XXX - 2 - 2

Capacitance Manometer
 		 Temperature

Flow Range

Electrical Connector
 		 Fitting

CMX

 

 

 

 

 0 - CMX0 (Ambient)

1 - CMX45 (45°C)

2 - CMX100 (100°C)

 

 

XXX - Full Scale Range

See data sheet for complete listing.

 

 

 

 2 - 15 Pin Male Sub D 

 See data sheet for complete listing.

 

 

 

2 - KF 16  Flange

3 - KF 25 Flange

4 - 8 VCR (1/2") Female

5 - Mini CF

See data sheet for complete listing.