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Products Mass Flow Controllers Metal Sealed 5850EM Series
Questions? Call 1-888-554-3569

5850EM Series Metal Sealed Thermal Mass Flow Controllers

Proven long-term stability. Ultra-pure performance for high pressure applications.
Models 5850EM / 5851EM

5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs. Its metal sealed construction and electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


For pricing information:

Request a Quote
5850EM Series Data Sheet

Features

  • Long-term zero stability of <0.2% full scale per year
  • <3 seconds settling time to command changes with negligible overshoot/undershoot
  • Wide flow range – from 3 sccm up to 30,000 slpm
  • High pressure rating - up to 1,500 psi
  • Optional enhanced process internal finish - 5µ inch Ra avg
  • Removable flow sensor
  • Insensitive to mounting attitude
  • Mechanically and electrically compatible with other mass flow controllers
  • TTL compatible "valve off" and purge function

Benefits

  • All-metal flow path enhances gas purity and reduces leaks
  • Proven long-term stability and accuracy across broad process and application range
  • Excellent return on investment due to reliable performance
  • Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures
  • Easily installed and serviced with analog only input/outputs

Applications

  • Fiber Optic
  • LED / MOCVD
  • Semiconductor
  • Solar
{3141C6E8-E1A9-438D-B5C4-D63EFAB1992A}
Product Type
Mass Flow Controller
{713B1CBC-7AC7-4571-B26E-32616A724893}
Differentiator

Large installed base with proven long term performance

{80D240C2-0FDE-46F9-9F84-1390C806AF3F}
Performance
{16DFC781-A8E5-4DF7-B59A-A7D8AD6EC46D}
Flow Range (Full Scale Capacity)
3 sccm - 30,000 sccm
{F4EDA08B-FE9E-4633-9B02-1B79CAA46CD8}
Accuracy

1% F.S. incl. linearity

1.5% F.S. incl. linearity >20 slpm

{E7F55DC5-8163-4F49-87AE-44538F4E21D0}
Repeatability

0.2% of rate

{80387D91-59AF-41A4-A923-069F68153DC3}
Linearity

±0.5% F.S. (included in accuracy)

{4643DD93-C8B4-408F-81B5-849F5D8C9F80}
Response Time

Normally Closed Valve: <3 sec

Optional: 600 msec

{DC3E88E8-CE65-4F1A-B4D3-A49224429ADD}
Multi-Gas & Range Configurability

—

{5BA547FE-F01D-4C7E-8C31-C2383EF04A1E}
Pressure Transient Insensitivity
—
{2B00ACC8-97F0-4B4F-B173-E896B7E106A8}
Control Range

2-3% - 100%

{B76DA73A-A60B-429A-AF8F-1ABCDDDC23CB}
Number of Bins

N/A

{7FF3A25B-6A9F-472C-A128-D4812238D575}
Valve Shut Down

N/A

{9B475C49-52FB-4400-B3DD-A3E6F63E01F6}
Zero Stability
< ±0.5% F.S. per year
{1066F28B-8754-4281-9B21-C2DDB64C77AA}
Mechanical
{1D4BD45E-5C3B-4C43-8B3B-A95C0870359B}
Seal Material
Metal
{17DC294D-5BD8-4BDD-9B81-BE1988283AB7}
Level of Purity / Surface Finish

316L VAR, 316L, and high alloy ferritic stainless steel

{51B2E417-C5D5-48ED-894D-9CE40119746B}
Wetted Materials

Valve Seat: 316L, Viton® fluoroelastomers, Buna-N, Kalrez® or Teflon®

{3041890D-EFFD-4198-B5A4-B065DB876ACA}
Valve Options

Normally Closed, Normally Open

Meter (no valve)

{33B32B4A-2FE4-4B3F-84C1-10AB6A7FE7B1}
Ratings
{C8A94F7F-0EB5-4591-9E19-D9221FEF8823}
Max Temperature
65oC
{CF7C75B3-9B99-400F-8AA5-9084A9F3F353}
Differential Pressure Range

5 - 50 psi (gas and range dependent)

{C190B420-32F2-4DC8-9822-088452814F4C}
Max Pressure

1500 psi

{7C1A9165-54B5-4700-B1C9-E382A7B7CACD}
Leak Integrity
1x10-10 atm cc/sec He
{4133F208-C666-415C-B6FE-F1877422381C}
Diagnostics & Display
{97D761CA-2851-4ED0-A1CD-F42559FF6030}
Diagnostic Capability
—

{0162F6AA-B99D-4CB8-9AD4-A95DDA3E04C3}
Status Lights
MFC Health, Network Status
{B9B24DC5-A4D2-4CBE-AD51-7E26B18618BC}
Alarms

Control Valve Output, Network Interruption

{AF6D6F2E-63AD-4F06-93C0-AAF8E2AC9783}
Diagnostic / Service Port

N/A

 

{73BEBF95-6EB5-42F0-AC39-EDC8D38EC382}
Electrical
{69999E75-097B-4696-A63F-A89263BBA3E2}
Analog Communication

4-20 mA

0-5 Vdc

{0303F12A-37EB-420A-BF47-53D86C711922}
Digital Communication

—

{BC195D12-9EB6-454A-86DE-F0B51AC868DE}
Electrical Connection

15 Pin D Connector (DA-15P)

{D6A6D2FA-C38B-49FA-9514-158EAF2DFE65}
Power Supply / Consumption

Normally Closed valve: 3.25 watts

Normally Open valve: 10.5 watts

{7153A00C-56D3-4DFD-8862-3144B0058333}
Compliance
{4AEEF581-7C84-4BF3-A1BF-B46966DF9571}
EMC

(89/336/EEC) per 61326

{69EA7516-24C1-40C6-BDA0-2E27979519B9}
Environmental Compliance

N/A

5850EM 5851EM
Differentiator
Flow Range (Full Scale Capacity) 3 sccm - 30,000 sccm 10 - 100 slpm Nitrogen
Surface Finish

Enhanced process (5 Ra avg.) internal finish (optional)

Enhanced process (5 Ra avg.) internal surface finish(optional)
Accuracy

1% F.S. including linearity

1.5% F.S. including linearity (>20 slpm)

1 % F.S. including linearity
Repeatability

0.25% Rate

0.25% Rate
Response Time

Normally Closed Valve

<3 sec

Normally Closed Valve

<3 sec
Multi-Gas & Range Configurability

N/A

N/A
Pressure Transient Insensitivity

.03% per psi (0-200 psi N2)

.03% per psi (0-200 psi N2)
Analog Communication

4-20 mA

0-5 Vdc

4-20 mA

0-5 Vdc
Digital Communication

N/A

 

 N/A
Filename File Type Documents By Language
Data Sheet pdf English
Installation & Operation Manual - 5850EM pdf English
Installation & Operation Manual - 5851EM pdf English
0250 Series
0250 Series
Controls and powers up to 4 devices