GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters

High purity flow path. Outstanding performance, reliability, and repeatability.
Models GF100 / GF101 / GF120 / GF120XSD / GF120XSL / GF121 / GF125 / GF126

Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity.

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GF100 Series Data Sheet

Features

  • Long-term zero stability of <±0.5% full scale per year
  • Settling times: 300 ms - <700 ms or 700 ms - <1 second
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path: option for 4µ or 10µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures 
  • MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Local display
  • Optional SDS gas delivery
  • DeviceNetTM, RS-485 L-Protocol and analog interfaces
  • Benefits

    • High-performance components marathon tested to seven times semiconductor industry standards for reliability
    • All metal, corrosion resistant flow path with reduced surface area and unswept volumes ensures faster dry-down during purge steps
    • With MultiFloTM, new process gases and/or ranges can be set in under 60 seconds – no more removing and calibrating MFCs
    • Highly configurable platform enables drop-in replacement and upgrade of most brands of metal sealed MFCs, including the former Celerity, Mykrolis, Tylan and UNIT brands
    • GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
    • Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting

    Applications

    • Semiconductor etch tools
    • Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
    • Physical vapor deposition (PVD) systems
    • Epitaxial process systems


    {67621A02-7699-4F12-BBDC-60D9004F0339}
    Product Type

    Mass Flow Controller

    {B39AB522-FCA3-4A92-B76F-8147E7A99DE1}
    Differentiator

    High Purity/Ultra-High Purity

    Standard GF Series

    High Flow GF Series

    Ultra-Fast Response Time

    Pressure Transient Insensitivity

    {0F724D3A-A6AF-4AE4-850F-7CB7D98ABC8A}
    Performance
    {DD04D52B-F1CB-49CB-8C3C-6DD4DCCE8F47}
    Flow Range (Full Scale Capacity)

    Standard GF Series: 3 sccm - 55 slm

    High Flow GF Series: 55 slm - 300 slm

    {081BE13A-92DA-4DE7-851E-2943A8B79405}
    Accuracy

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    {3A51093B-CA51-41BB-881F-3F228AB4B9AC}
    Repeatability
    < ±0.15% S.P.
    {9642EE73-6469-41B0-9635-D0FC77DE416C}
    Linearity

    ±0.5% F.S. (included in accuracy)

    {F6EAA9AA-9EFA-499A-87B8-41E6B509AF51}
    Response Time

    Normally Closed Valve:

    300 ms - < 700 ms

    700 ms - < 1 sec

    SDS Gas Delivery: < 3 sec

    {02AA87A4-3B1E-4F25-B7D0-105C6C9F9FD1}
    Response Time

    Normally Open Valve: <1.5 sec (specific models)

    {05574362-0330-4B02-B820-5123105D6513}
    Multi-Gas & Range Configurability
    MultiFlo™ Standard (most models)
    {538D3201-786E-4A32-B275-41597E0CE7E0}
    Pressure Transient Insensitivity

    <5% S.P. for up to 5 psi/sec upstream press. spike

    {DF7B02EF-6342-4148-B7F6-794315818D3B}
    Control Range

    Standard GF Series: < 3-100%

    High Flow GF Series: 5-100%

    {9C3AA3E1-C5FC-48E8-B36A-C195F8F606DD}
    Number of Bins

    Standard GF Series: 11 bins

    High-Flow GF Series: 4 bins

    {438A9418-BB97-43D1-81C5-B0A52D92C0FD}
    Valve Shut Down

    Standard GF Series: < 1% F.S.

    High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out

    {11E8DCA4-4E3B-4975-9BE5-EBA91C80801C}
    Zero Stability
    < ±0.5% F.S. per year
    {39961ABF-0D9C-4C4F-B2E5-DD244D234A9F}
    Flow Temperature Coefficient

    Span: 0.05% S.P. per °C

    Zero: 0.005% F.S. per °C

    {92DB7D93-6B51-4A9B-9B45-E7AC9B4F0848}
    Mechanical
    {00FD366A-9377-49D6-BB7A-C0AF22DC8434}
    Seal Material
    Metal
    {53181BE2-787E-48EC-8BA0-712085A1CE8C}
    Level of Purity / Surface Finish
    4 - 10µ inch Ra
    {E9DFB78F-5DA5-4974-852B-271C5300CB93}
    Wetted Materials

    SEMI F20 HP/UHP Compliant

    316L VIM/VAR

    Hastelloy C-22

    316L Stainless Steel

    304 Stainless Steel

    KM-45

    {D991E384-0015-45DF-8B6E-4B3975F9EFE5}
    Valve Options

    Normally Closed

    Normally Open (specific models only)

    Meter (no valve)

    {E9BE919F-CF9A-4818-A0E0-55DEE43D53A7}
    Ratings
    {00DFAA0D-4DDD-4057-8EC1-F713D0EB0233}
    Max Temperature
    50oC
    {9D73B7BD-D7C3-4C56-B408-FA7D94CD8FED}
    Differential Pressure Range

    3-860 sccm = 7-45 psid

    861-7200 sccm = 10-45 psid

    7201-55000 sccm = 15-45 psid

    51 slm-300 slm = 30-90 psid

    *Typical pressure drops. Contact Brooks Technical Support for more information.

    {E7A1C04C-79EC-4FAC-B1E1-BD576CA8D52E}
    Max Pressure

    Standard GF Series: 500 psia max

    High Flow GF Series: 75 psig (controller), 150 psig (meter)

    {D5A59A33-B974-4ED4-98D8-4C092762422D}
    Leak Integrity
    1x10-10 atm cc/sec He
    {4C4BA641-C44D-4E88-AA7E-98F200705CB6}
    Diagnostics & Display
    {6136989F-23CC-4A62-9BCD-6660E022B2AF}
    Diagnostic Capability
    Available

    {D549975F-CA5B-4308-944C-1138276AECCC}
    Status Lights

    MFC Health

    Network Status

    {E9C0F579-B726-429F-8B14-788F805E8DA1}
    Alarms

    Control Valve Output

    Network Interruption

    {6CF6BE50-F8FF-4B83-98B2-F5AA0B788BAF}
    Diagnostic / Service Port

    RS-485 via 2.5mm jack (all models)

    {4D8488B6-EB3E-4DED-95D7-2D5D6699626F}
    Display

    Top Mount Integrated LCD

    Viewing Angle: Fixed

    Viewing Distance: 10 feet

    Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)

    Resolution: 0.1 (unit)

    {57E85A87-41A2-4A75-B778-6FC689FC2A65}
    Electrical
    {B7240DE5-C6E2-4C99-862B-810A5FFE0507}
    Analog Communication

    0-5 Vdc

    {CB62894D-8440-4FCD-9829-5ED4E4050233}
    Digital Communication

    DeviceNet™

    RS485 L-Protocol

    {A407DCFB-4517-4752-921F-E0BA3951ED2D}
    Electrical Connection

    Analog/RS485 via 9-Pin "D" connector

    DeviceNet™ via 5-Pin "M12" connector

    Various cable adaptors available. See product data sheet for more information.

    {CAC8E733-6343-4F57-81A0-B1E808EE51AB}
    Power Supply / Consumption

    Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)

    DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc

    (Under typical operating conditions)

    {A2B444AF-2A63-4013-9661-DA1BCA525685}
    Compliance
    {BD155239-DD6A-4B7D-B9E9-3D97DFA8423B}
    EMC

    EC Directive 2004/108/EC

    CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

    {67256706-43E8-4E93-9191-90484E5B5D81}
    Environmental Compliance

    RoHS Directive (2011/65/EU)

    REACH Directive EC 1907/2006

    GF100 GF101 GF120 GF120XSD GF120XSL GF121 GF125 GF126
    Differentiator

    High Purity

    High Purity

    High Flow Rate

     

    Ultra-High Purity

    Ultra-Fast Response Time

     

    SDS Gas Delivery

    SDS Gas Delivery

    Ultra-High Purity

    High Flow Rate

    Ultra-High Purity

    Ultra-Fast Response Time

    Pressure Transient Insensitivity

    Ultra-High Purity

    High Flow Rate

    Pressure Transient Insensitivity

    Flow Range (Full Scale Capacity) 3 sccm - 55 slm

    55 slm - 300 slm

    3 sccm - 55 slm >25 sccm - 1 slm 4 - 25 sccm

    55 slm - 300 slm

    3 sccm - 55 slm

    55 slm - 300 slm

    Surface Finish 10µ inch Ra 10µ inch Ra 4µ inch Ra 4µ inch Ra 4µ inch Ra 4µ inch Ra 4µ inch Ra 4µ inch Ra
    Accuracy

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    Repeatability < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.

    < ±0.15% S.P.

    < ±0.15% S.P.

    < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.
    Response Time

    Normally Closed

    <1 sec

    Normally Closed

    <1 sec

    Normally Closed

    700 ms

    Normally Closed

    <3 sec

    Normally Closed

    <3 sec

    Normally Closed

    <1 sec

    Normally Closed Valve

    300ms (3-860 sccm N2 Eq.)

    400ms (861-7200 sccm N2 Eq.)

    500ms (7201-30000 sccm N2 Eq.)

    <700ms (30001-55000 sccm N2 Eq.)

     

    Normally Closed Valve

    <1 sec

     

    Response Time

    Normally Open

    <1.5 sec

    Normally Open

    Normally Open

    <1.5 sec

    Normally Open

    Normally Open

    Normally Open

    Normally Open Valve

    <1.5 sec

    Normally Open Valve

    Multi-Gas & Range Configurability MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard
    Pressure Transient Insensitivity

    ±5% S.P. up to 5 psi/sec upstream press. spike

    Ability to measure inlet pressure

    Diagnostic Capability

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    Status Lights - MFC Health, Network Status

    Alarms - Control Valve Output, Network Interruption

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    Analog Communication

    0-5 Vdc

    0-5 Vdc

    0-5 Vdc

    0-5 Vdc

    0-5 Vdc

    0-5 Vdc

    0-5 Vdc

    0-5 Vdc

    Digital Communication

    RS485 L Protocol

    DeviceNet™

     

    RS485 L Protocol

    DeviceNet™

     

    RS485 L Protocol

    DeviceNet™

     

    RS485 L Protocol

    DeviceNet™

     

    RS485 L Protocol

    DeviceNet™

     

    RS485 L Protocol

    DeviceNet™

     

    RS485 L Protocol

    DeviceNet™

    RS485 L Protocol

    DeviceNet™

     

    Filename File Type Documents By Language
    Data Sheet - GF100, GF120, GF125 pdf English
    Data Sheet - GF101, GF121, GF126 pdf English
    Installation & Operation Manual pdf English
    DeviceNet™ Supplemental Manual - GF100 Series pdf English
    RS485 L-Protocol Supplemental Manual - GF100 Series pdf English

    Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

    Example: GF100 - AS - G1

    Meter Series
    Fitting
    Connector
     GF1xx AS - 1-1/2” body width, 92 mm 0.440” large bore C Seal (only for bins SH45-SH50)
    BX - Cable adapter to 15 pin D Brooks (Unit “B”,”N”) adapts G1 base
      CX - 1-1/8” body width, 92 mm C Seal
    *DX - DeviceNet™ 5 pin micro
      VX - 1-1/2” body width, 124mm 1/4” VCR male
    EX - Cable adapter to Card Edge (w/o VTP), RS485 through RJ11 jacks (Unit”E”; IN “L”, “R”) adapts GX base
      WX - 1-1/8” body width, 92mm W Seal
    GX - 9-Pin D with RS485 (Unit”G”); display and overlay 180 degree orientation
        G1 - 9-Pin D with RS485 (Unit”G”)
        SX - 9 pin D with STEC pin-out (w/VTP) (Unit”S”,”Q”)
    Filename File Type
    GF100-GF120-GF125-AS-G1 STEP
    GF100-GF120-GF125-AS-SX DXF
    GF100-GF120-GF125-AS-SX IGS
    GF100-GF120-GF125-AS-SX STEP
    GF100-GF120-GF125-AX-G1 IGS
    GF100-GF120-GF125-AX-G1 STEP
    GF100-GF120-GF125-CX-DX STEP
    GF100-GF120-GF125-CX-GX DXF
    GF100-GF120-GF125-CX-GX IGS
    GF100-GF120-GF125-CX-GX STEP
    GF100-GF120-GF125-CX-SX DXF
    GF100-GF120-GF125-CX-SX STEP
    GF100-GF120-GF125-CX-TX DXF
    GF100-GF120-GF125-CX-TX IGS
    GF100-GF120-GF125-CX-TX STEP
    GF100-GF120-GF125-DX-DX DXF
    GF100-GF120-GF125-DX-DX IGS
    GF100-GF120-GF125-DX-DX STEP
    GF100-GF120-GF125-DX-TX DXF
    GF100-GF120-GF125-DX-TX IGS
    GF100-GF120-GF125-DX-TX STEP
    GF100-GF120-GF125-LX-DX DXF
    GF100-GF120-GF125-LX-DX IGS
    GF100-GF120-GF125-LX-DX STEP
    GF100-GF120-GF125-VS-E0 DXF
    GF100-GF120-GF125-VS-E0 IGS
    GF100-GF120-GF125-VS-E0 STEP
    GF100-GF120-GF125-VS-G1 DXF
    GF100-GF120-GF125-VS-G1 IGS
    GF100-GF120-GF125-VS-G1 STEP
    GF100-GF120-GF125-VS-GX DXF
    GF100-GF120-GF125-VS-GX IGS
    GF100-GF120-GF125-VS-GX STEP
    GF100-GF120-GF125-VS-SX DXF
    GF100-GF120-GF125-VS-SX IGS
    GF100-GF120-GF125-VS-SX STEP
    GF100-GF120-GF125-VS-TX DXF
    GF100-GF120-GF125-VS-TX IGS
    GF100-GF120-GF125-VS-TX STEP
    GF100-GF120-GF125-VX-BX STEP
    GF100-GF120-GF125-VX-DX STEP
    GF100-GF120-GF125-VX-E0 DXF
    GF100-GF120-GF125-VX-E0 IGS
    GF100-GF120-GF125-VX-E0 STEP
    GF100-GF120-GF125-VX-EX STEP
    GF100-GF120-GF125-VX-G1 STEP
    GF100-GF120-GF125-VX-GX STEP
    GF100-GF120-GF125-VX-KX DXF
    GF100-GF120-GF125-VX-KX IGS
    GF100-GF120-GF125-VX-KX STEP
    GF100-GF120-GF125-VX-SX STEP
    GF100-GF120-GF125-WX-DX DXF
    GF100-GF120-GF125-WX-DX IGS
    GF100-GF120-GF125-WX-DX STEP
    GF100-GF120-GF125-WX-GX STEP
    GF100-GF120-GF-125-WX-SX DXF
    GF100-GF120-GF-125-WX-SX IGS
    GF100-GF120-GF-125-WX-SX STEP
    GF101-GF121-GF126-V1-D0 DXF
    GF101-GF121-GF126-V1-D0 IGS
    GF101-GF121-GF126-V1-D0 STEP
    GF101-GF121-GF126-V1-DX DXF
    GF101-GF121-GF126-V1-DX IGS
    GF101-GF121-GF126-V1-DX STEP
    GF101-GF121-GF126-V1-G1 DXF
    GF101-GF121-GF126-V1-G1 IGS
    GF101-GF121-GF126-V1-G1 STEP
    GF101-GF121-GF126-V2-G1 DXF
    GF101-GF121-GF126-V2-G1 IGS
    GF101-GF121-GF126-V2-G1 STEP
    GF101-GF121-GF126-V2-SX DXF
    GF101-GF121-GF126-V2-SX IGS
    GF101-GF121-GF126-V2-SX STEP
    0250 Series
    Controls and powers up to 4 devices
    MultiFlo™ Configurator
    A comprehensive gas database enabling you to configure your MultiFlo™ capable MFC for thousands of gas types and ranges without removing it from the gas line.