GP200 Series Metal Sealed Pressure-based Mass Flow Controllers

All of the performance. None of the limitations.

GP200 Series is the first fully pressure-insensitive pressure-based mass flow controller (P-MFC) designed specifically for advanced Etch and Deposition processes in semiconductor manufacturing.

The GP200 Series P-MFC features a patented architecture that overcomes the limitations of conventional P-MFCs to provide the most precise process gas delivery even when delivering low vapor pressure process gases. It includes several unique design aspects, including an integrated differential pressure sensor coupled with a downstream valve architecture enabling the most precise process gas delivery over the widest range of operating conditions in the industry.

Since GP200 Series supports such a broad range of process conditions, it can be used as a drop-in replacement and upgrade for many traditional P-MFCs and thermal MFCs. It reduces the complexity and cost of ownership of the gas delivery system because it eliminates the need for components such as pressure regulators and transducers.

Get more details about the design of GP200 Series and see how it works.

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569

For pricing information:

Request a Quote

GP200 Series Data Sheet

Features

True differential pressure measurement
Lower inlet pressure operation
Downstream valve architecture
Matched transient response
Zero Leak-by Control Valve
MultiFlo^TM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy
Local display indicates flow, temperature, pressure and network address
DeviceNet^TM, EtherCAT®, RS-485 L-Protocol and analog interfaces

Benefits

By removing the requirement to match and compensate two separate pressure transducers, the GP200 differential pressure technology reduces measurement uncertainty for enhanced accuracy, repeatability and drift performance.
Safer fab operation at lower inlet pressures is now achievable with a P-MFC due to the GP200 differential pressure sensor that is specifically optimized for low differential pressure measurement.
The downstream valve architecture ensures accuracy is independent of downstream pressure, enabling flow delivery into pressures as high as 1200 Torr. The fast closing valve addresses non-productive recipe wait times, or "tail effects," seen in upstream MFC valve designs that require additional time to bleed down their internal volume of gas.
Ultra-fast, highly repeatable ascending and descending flow stabilization time enables tighter process control in advanced high cycle Deposition and Etch processes.
100X improvement in valve shut-down
With MultiFlo^TM, MFC full scale flow range can be re-scaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications, for optimum process and inventory flexibility
Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting

Key Applications

Semiconductor manufacturing
Etch
Chemical Vapor Deposition (CVD)
Gas flow control applications that require a high purity all-metal flow path

Product Type

Mass Flow Controller

Differentiator

Fully Pressure Insensitive P-MFC

Most Precise Process Gas Delivery Over the Widest Range of Operating Conditions

Performance

Flow Range (Full Scale Capacity)

3 sccm - 50,000 sccm

Accuracy

Zero Leak Valve

<±1% S.P. (5-100% F.S.)

<±0.05% F. S. (0.5-5% F.S.)

Metal Seal Valve

<±1% S.P. (5-100% F.S.)

<±0.05% F. S. (2-5% F.S.)

Repeatability

< ±0.15% S.P.

Response Time

280 ± 20 ms Matched Transient Response, for any ascending or descending non-zero setpoint

Multi-Gas & Range Configurability

MultiFlo™ Standard

Pressure Transient Insensitivity

<± 1% S.P. up to 40 psi/sec inlet pressure spike

Control Range

Zero Leak Valve

0.5 - 100% F.S.

Metal Seal Valve

2 - 100% F.S.

Number of Bins

Nine (9) standard bin ranges

Zero Stability

< ±0.15% F.S. per year

Flow Temperature Coefficient

Zero: 0.005% F.S. per °C

Span: 0.05% S.P. per °C

Mechanical

Seal Material

Metal

Level of Purity / Surface Finish

5µ inch Ra avg

Wetted Materials

316L

Hastelloy C-22

316/316L Stainless Steel

304 Stainless Steel

KM-45

PCTFE

Valve Options

Normally Closed

Ratings

Max Temperature

60^oC

Differential Pressure Range

Min: 7 psid

Max: up to 50 psid

Max Pressure

150 psia

Diagnostics & Display

Diagnostic Capability

Available

Status Lights

DeviceNet

MFC Health

Network Status

EtherCAT

Run

Error

Power

Network Status

RS-485 (analog)

Network Status

Alarms

Process Control Deviations

Flow

Temperature

*For full list of alarms see supplemental communication manuals

Diagnostic / Service Port

RS-485 via micro-USB

Display

Top Mount Integrated LCD

Viewing Angle: Rotatable

Viewing Distance: 10 feet

Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)

Resolution: 0.1 (unit)

Electrical

Analog Communication

0-5 Vdc

Digital Communication

DeviceNet™

EtherCAT®

RS-485 L-Protocol

Electrical Connection

Analog/RS-485 via 9-Pin "D" connector

DeviceNet™ via 5-Pin "M12" connector

EtherCAT® via RJ45 jacks, Power via 5-pin M8 connector

Power Supply / Consumption

Analog/RS-485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)

DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc

EtherCAT™: 360 mA max @ +18-30 Vdc, 270 mA max @ 24 Vdc

(Under typical operating conditions)

Compliance

EMC

2014/30/EU EMC Directive EN:61326-1: 2013

Environmental Compliance

2011/65/EU & 2015/863/EU RoHS Directive

EC 1907/2006 REACH Directive

Filename	File Type	Documents By Language
Data Sheet	pdf	English Japanese Korean
Installation and Operation Manual	pdf	English
DeviceNet™ Supplemental Manual - GP200 Series	pdf	English
EtherCAT® Supplemental Manual - GP200 Series	pdf	English
RS485 L-Protocol Supplemental Manual - GP200 Series	pdf	English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: GP200 - Fitting - Communications - STEP

Filename	File Type
GP200-CSEAL-ANALOG	STEP
GP200-CSEAL-DNET	STEP
GP200-CSEAL-ETHERCAT	STEP
GP200-CSEAL-PY-ANALOG	STEP
GP200-CSEAL-PY-DNET	STEP
GP200-CSEAL-PY-ETHERCAT	STEP
GP200-VCR-ANALOG	STEP
GP200-VCR-DNET	STEP
GP200-VCR-ETHERCAT	STEP
GP200-WSEAL-ANALOG	STEP
GP200-WSEAL-DNET	STEP
GP200-WSEAL-ETHERCAT	STEP