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Elastomer Sealed Pressure Controllers

Achieve better accuracy, stability and reliability with stable electronic pressure controllers.

Elastomer sealed pressure controllers from Brooks Instrument are designed to be rugged, durable and cost-effective while delivering the sustained and proven accuracy users worldwide count on from the leader in fluid measurement and control. Our electronic pressure controllers utilize the core control technology present in our industry-leading thermal mass flow controllers.

Our elastomer sealed pressure controllers deliver closed loop control by eliminating the droop and hysteresis associated with traditional mechanical spring diaphragm pressure regulators. Brooks pressure controllers are available with internal pressure sensors to control pressure up to 4500 psig. The result: electronic pressure controllers that keep critical processes on-target.

PRODUCTS

5866RT
5866RT
SLA10/20/40 Series
SLA10/20/40 Series
SLAMf10/20 Series
SLAMf10/20 Series
Product Type

Pressure Controller & Flow Meter

Pressure Controller Pressure Controller
Differentiator

Remote Transducer

Pressure Control & Flow Measurement

Wide Pressure Measurement & Control Range

NEMA 4X/IP66 approved enclosure

Perfect for hosedown/washdown applications

Wide Pressure Measurement & Control Range

 

Pressure Control Range

100:1 for a remote transducer with a 0-10 V output

Turndown 100:1 for FS from 1-50 lpm

50:1 for all other FS flows

Turndown 100:1 for FS from 1-50 lpm

50:1 for all other FS flows

Flow Range (Full Scale Capacity)

Any range 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.

.003 - 50 lpm .003 - 50 lpm
Accuracy

Flow Accuracy:

 ±1% F.S. including linearity at the calibration conditions

±1.5% F.S. for flow rates greater than 20 slm

Pressure

±0.25% of Transducer FS (FS > 300 psia)
±0.12% of Transducer FS (FS < 300 psia)

Flow

N/A

Pressure

±0.25% of Transducer FS (FS > 300 psia)
±0.12% of Transducer FS (FS < 300 psia)

Flow

N/A

Response Time

Pressure Response Time:

< 0.8 sec typical for a 0-100% command step with <2% pressure overshoot.

Actual pressure response depends on system design.

System dependent

System dependent

Repeatability

±0.25% of rate

0.20% SP

0.20% SP

Seal Material Elastomer or Metal Elastomer Elastomer
Diagnostic Capability

Available

Available

Analog Communication

0-5 V

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

Digital Communication

DeviceNet™

Profibus®

RS-485

DeviceNet™

Profibus®

RS-485

Size

Compact

Medium

Large

Certifications/Approvals

ATEX

IECEx

ATEX

IECEx