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产品 质量流量控制器 金属密封 EtherCAT® GF100系列

最快速、最精准的MFC

加强了拥有EtherCAT®的速度
型号 GF100 / GF101 / GF120 / GF120 / GF120XSD / GF120XSL / GF121 / GF125 / GF126

如有疑问

请与我们的应用工程专家取得联系:

联系电话: + 86-21-38720770 传真

得到报价

EtherCAT® GF100 Series Flyer

针对半导体工艺的完美性能

  • 嵌入式诊断利用实时以太网数据采集能力
  • 超稳定流量传感器（每年≤设定值0.15%的漂移）使低流量更精准，同时减少维修的需求
  • 改进的阀门关闭（≤bin范围的0.15%）减少阀门内漏，从而改善第一片晶圆效应
  • 新增强的抗压力瞬时波动在持续流体传输中降低了串扰流敏感度

特点

  • 每年<满量程的±0.15%的长期零点稳定性
  • 响应稳定时间: 300毫秒 - <1秒
  • 最大流量可达到300 slpm
  • 全金属密封的流体通路：可选5µ 或 10µ inch Ra的表面粗糙度
  • 抗腐蚀的哈氏合金升温传感器在温度升高时改善了测量的重复性
  • MultiFloTM 气体和量程的可编程性—一台表，几千种气体和量程的组合，无需把MFC从管路上拆除，也不会影响精度
  • 方便的用户显示和独立的诊断/服务端口可帮助仪表安装，监测和故障排查
  • GF120 安全传输系统(SDS®)是布鲁克斯最先进的低压降质量流量控制计，用于离子注入和刻蚀工艺的负压安全传输系统的气体传输 

优势

  • 超常的性能
    • 快速反应时间改进应用效率
  • 灵活的拓扑
    • 几乎无限的网络拓扑可能
  • 简单、坚固
    • 配置，诊断以及维护
  • 负担能力
    • 标准的以太网端口

应用

  • 半导体刻蚀设备
  • 薄膜化学气相沉积系统 (CVD, MOCVD, PECVD, ALD)
  • 物理气相沉积 (PVD) 系统
  • 外延工艺系统

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产品类型

Mass Flow Controller

{8B89F14C-B912-4424-BCC5-AA95C46D59C6}
区别

EtherCAT Communication

High Purity/Ultra-High Purity

Embedded Diagnostics

Ultra-stable Flow Sensor

Improved Valve Shutdown

{FFBE3C7F-0139-4CBE-AF94-74D8A0B30009}
性能
{98B3C086-0985-4066-807F-25A2E7C53EEB}
流量范围-满量程容量

Standard GF Series: 3 sccm - 55 slm

High Flow GF Series: 55 slm - 300 slm

{057BC068-8AB8-4BD6-A8B3-CD29145D4DF9}
精度

Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%

High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35%

{5B41E208-F4F0-4FC0-9111-CD17A8732770}
重复性
< ±0.15% S.P.
{DD758BDD-DC5E-4D81-B070-C51FEA9BEA18}
响应时间-常闭

Normally Closed Valve: 300 ms - < 1 sec

SDS Gas Delivery: < 3 sec

{2F1BACB2-A180-49D2-B83D-EF895EA85224}
响应时间-常开

Normally Open Valve: <1.5 sec (specific models)

{D301F211-A735-4E4E-B229-495A16152C83}
瞬时压力波动不敏感

Specific models

{B0847CB2-612D-47B5-AF00-D9D3CB8DAD32}
多气体多量程
MultiFlo™ Standard (most models)
{1374FB78-7FB7-4CFF-A118-5F0CAD7B25A1}
控制范围

Standard GF Series:  2-100%

High Flow GF Series: 5-100%

{0C2AFBD5-F1CD-48C0-8FC4-5216C27FF550}
Bin的数量

Standard GF Series: 11 bins

High-Flow GF Series: 4 bins

{C7BE52FB-B8E6-44DC-BEFB-DCF0FBE99991}
阀门关闭

Standard GF Series: < 0.15% F.S.

High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out

{3F92A104-D508-4775-8D9D-7E7DCE62EDD9}
零点稳定性

< ±0.15% F.S. per year

{60452C9A-BF36-444D-93A6-CCEE2F21D1C1}
温度系数

Span: 0.05% S.P. per °C

Zero: 0.005% F.S. per °C

{BCC7C7BB-C17C-4AA7-9ADD-61780C3EE5F4}
机械
{0958A6A9-71D6-4F26-9137-91EDC4625EA5}
密封材料
Metal
{03131EF2-B3E3-48A2-99D2-FA45A35FF3E3}
纯净等级

5 - 10µ inch Ra

{87A68973-BB8F-487E-855A-69FEA4FFFF66}
接液材料

SEMI F20 HP/UHP Compliant

316L VIM/VAR

Hastelloy C-22

316L Stainless Steel

304 Stainless Steel

KM-45

{8FC7632B-8368-41BD-826E-B464E8A5E0BC}
阀门

Normally Closed

Normally Open (specific models only)

Meter (no valve)

{94F70132-F545-4627-9AE6-23B21068029A}
等级
{8B312DB0-CCA6-4685-AF36-F91260857AE9}
最大温度
50oC
{80BBEAF4-4D4F-49A0-8C75-7199B4A700A8}
压差范围

3-860 sccm = 7-45 psid

861-7200 sccm = 10-45 psid

7201-55000 sccm = 15-45 psid

51 slm-300 slm = 30-90 psid

SDS Models 10 Torr- 30 psid typical

*Typical pressure drops. Contact Brooks Technical Support for more information.

{7A261F9D-32B9-4A05-B2FC-96981C6ED085}
最大压力

Standard GF Series: up to 500 psia max

High Flow GF Series: 75 psig (controller), 150 psig (meter)

{6E5FC165-C3A0-43F7-A3A6-65541C20BA4D}
漏率
1x10-10 atm cc/sec He
{FD0F3EAE-7739-4E0D-AEAB-34FA7068CA98}
诊断和显示
{4C717972-2B93-453A-AE05-A480456E8950}
诊断能力
Available

{1EDA9026-203E-4B26-86C4-3BE44F6E9364}
状态灯

Run

Error

Power

Network Status

{AFFD95BD-CF8E-4D68-B535-F99D31B78954}
报警

Control Valve Output

Network Interruption

Temperature High/Low

Pressure High/Low

Power Surge/Sag

{E866E098-05A5-4290-94ED-9267E9BC1068}
诊断/服务端口

Micro USB

{0B05CA40-E0DB-4DFF-915C-FC9D400DDBDF}
显示

Top Mount Integrated LCD

Viewing Angle: Fixed

Viewing Distance: 10 feet

Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)

Resolution: 0.1 (unit)

{2968243A-89B4-47FA-95CF-5CC6A110956B}
电气
{26790E4F-2742-4CEB-BCAD-961628E74B1C}
模拟通讯

—

{8DF0F740-166B-4660-B620-D7997FA6AACE}
数字通讯

EtherCAT®

{53E88974-5783-4CA5-98F3-B802CD91CC8F}
电气连接

Power via 5-pin M8 Connector, EtherCAT via twin RJ45

{AEE200ED-68A0-43B5-B9DC-BD8F1863CA4F}
电源-功耗

24 Vdc, 7 Watts

(Under typical operating conditions)

GF100 GF101 GF120 GF120 GF120XSD GF120XSL GF121 GF125 GF126
区别

High Purity

High Purity

High Flow Rate

Ultra-High Purity

Ultra-Fast Response Time

Highest Flow Range

Proven, reliable technology

SDS Gas Delivery

SDS Gas Delivery

Ultra-High Purity

High Flow Rate

Ultra-High Purity

Ultra-Fast Response

Pressure Transient Insensitivity

High Flow Rate
流量范围-满量程容量 3 sccm - 55 slm

55 slm - 300 slm

 3 sccm - 55 slm 3 sccm - 55 slm >25 sccm - 1 slm 4 - 25 sccm

55 slm - 300 slm

 3 sccm - 55 slm

55 slm - 300 slm
表面抛光 10µ inch Ra 10µ inch Ra

5µ inch Ra

 4µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra
精度

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%
重复性 < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.

< ±0.15% S.P.

< ±0.15% S.P.

 < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.
响应时间-常闭

Normally Closed

<1 sec

Normally Closed

<1 sec

Normally Closed

700 ms

Normally Closed

700 ms

Normally Closed

<3 sec

Normally Closed

<3 sec

Normally Closed

<1 sec

Normally Closed

300ms - <700ms

 

Normally Closed

<1 sec

 
响应时间-常开

Normally Open

<1.5 sec

Normally Open

—

Normally Open

<1.5 sec

Normally Open

<1.5 sec

Normally Open

—

Normally Open

—

Normally Open

—

Normally Open

<1.5 sec

Normally Open

—
多气体多量程 MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard — — MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard
瞬时压力波动不敏感 — — — — — — —

±5% S.P. up to 5 psi/sec upstream press. spike

Ability to measure inlet pressure
诊断能力

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights: MFC Health & Network Status

Alarms: Control Valve Output & Network Interruption

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms
数字通讯

EtherCAT

EtherCAT

EtherCAT

RS485 L Protocol

DeviceNet™

 

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT
文件名 文件类型 文档语言
Flyer pdf English
Data Sheet GF100 EtherCAT pdf English
Data Sheet GF120xHT pdf English
Installation & Operation Manual pdf English
EtherCAT® Supplemental Manual - GF1xx pdf English
0250 读数应用
0250 读数应用
Controls and powers up to 4 devices
MultiFlo™ 配置器
MultiFlo™ 配置器
A comprehensive gas database enabling you to configure your MultiFlo™ capable MFC for thousands of gas types and ranges without removing it from the gas line.