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区别
High Purity/Ultra-High Purity
Standard GF Series
High Flow GF Series
Ultra-Fast Response Time
Pressure Transient Insensitivity
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流量范围-满量程容量
Standard GF Series: 3 sccm - 55 slpm
High Flow GF Series: 55 slpm - 300 slpm
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精度
±1% S.P. > 35-100%
±0.35% F.S. 2-35%
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线性
±0.5% F.S. (included in accuracy)
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响应时间-常闭
Normally Closed Valve:
300 ms - < 700 ms
700 ms - < 1 sec
SDS Gas Delivery: < 3 sec
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响应时间-常开
Normally Open Valve: <1.5 sec (specific models)
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多气体多量程
MultiFlo™ Standard (most models)
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瞬时压力波动不敏感
<5% S.P. for up to 5 psi/sec upstream press. spike
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控制范围
Standard GF Series: < 3-100%
High Flow GF Series: 5-100%
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Bin的数量
Standard GF Series: 11 bins
High-Flow GF Series: 4 bins
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阀门关闭
Standard GF Series: < 1% F.S.
High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out
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零点稳定性
< ±0.5% F.S. per year
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温度系数
Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C
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接液材料
SEMI F20 HP/UHP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45
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阀门
Normally Closed
Normally Open (specific models only)
Meter (no valve)
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压差范围
3-860 sccm = 7-45 psid
861-7200 sccm = 10-45 psid
7201-55000 sccm = 15-45 psid
51 slm-300 slm = 30-90 psid
*Typical pressure drops. Contact Brooks Technical Support for more information.
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最大压力
Standard GF Series: 500 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)
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状态灯
MFC Health
Network Status
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报警
Control Valve Output
Network Interruption
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诊断/服务端口
RS-485 via 2.5mm jack (all models)
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显示
Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)
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数字通讯
DeviceNet™
RS485 L-Protocol
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电气连接
Analog/RS485 via 9-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
Various cable adaptors available. See product data sheet for more information.
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电源-功耗
Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)
DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc
(Under typical operating conditions)
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电磁兼容性
EC Directive 2004/108/EC
CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
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符合环保要求
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006