SLAMf 系列橡胶密封热式质量流量计和控制器

精准的质量流量控制，针对苛刻使用环境进行了强化

型号 SLAMf50 / SLAMf51 / SLAMf53 / SLAMf60 / SLAMf61 / SLAMf63 / SLAMf64

无论是灰尘、湿度、温度极限或是冲洗条件下，SLAMf 系列橡胶密封热式质量流量计和控制器均能够表现出经验证的 SLA5800 系列仪表和控制器的高精度特性和长期稳定性。专门设计的 IP66 外壳可保护产品先进的数显电子元件并确保气体和液体质量流量（对过程要求严格）测量和控制的稳定和准确。

如有疑问

请与我们的应用工程专家取得联系:

联系电话: + 86-21-38720770 传真

得到报价

SLAMf 系列数据表

特点

IP66 级加固外壳
适用的流量额定值范围宽 - 0.003 至高达 2500 lpm
适用于各种温度和压力条件
行业领先的热流量测量传感器技术为你提供出色的测量精度
可编程多气体/多范围功能
采用先进的常规自检功能并配有独立的诊断维护端口，因此用户无需拆除 MFC 即可进行故障排除或流量条件切换
包括 DeviceNet™、EtherCAT®、Profibus® 和 RS-485加模拟接口在内的各种通信选件

优势

加固的设备外壳可为工艺精度和苛刻条件下的控制性能提供保障
独有的热感测技术可在低设定值条件下提供绝佳的信噪比
传感器的长期稳定性可降低对维护和定期校准的要求
选择一台设备即可设定多达六种不同的气体校准信息
对用户开放的服务端口简化了安装、故障排除和诊断操作
得益于基于国际标准的高级计量系统和校准技术，产品拥有出色的测量精度
多协议通信接口可简化向现有系统的集成操作

应用

化学与石化行业试验工场
生命科学实验室
食品加工中的氮封

产品类型

Mass Flow Controller

区别

IP66 Approved Enclosure

Perfect for Hose Down/Wash Down Applications

Hazardous Area Approvals

性能

流量范围-满量程容量

.003 - 2500 slpm

精度

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20-100% FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS

Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20-100% FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

重复性

0.20% SP

线性

Included in Accuracy

响应时间-常闭

<1 second up to 100 lpm

<3 seconds up to 2500 lpm

多气体多量程

Standard

最大压力

Up to 100 lpm: 1500 psi/100 bar

Up to 50 lpm: 4500psi/310 bar (optional)

100-2500 lpm: 1000 psi/70 bar

控制范围

1-50 slpm: 100:1 Turndown for F.S.

50-2500 lpm: 50:1 Turndown for F.S.

零点稳定性

< 0.2% F.S. per year

温度系数

Zero: <0.05% of F.S. per °C

Span: < 0.1% of S.P. per °C

压力系数

±0.03% per psi (0-200 psi N2)

灵敏度

<0.2% F.S. maximum deviation from specified accuracy after re-zeroing

等级

最大温度

65^oC

压差范围

Controllers

Up to 50 lpm: 5 psi/0.35 bar min - 1500 psi/103.4 bar max

50-100 lpm: 10 psi/0.69 bar min - 50 psi/3.45 bar max

500 lpm: 7.5 psi/0.52 bar min - 300 psi/20.0 bar max

1000 lpm: 14.5 psi/1.00 bar min - 300 psi/20.0 bar max

2500 lpm: 35.0 psi/2.41 bar min - 300 psi/20.0 bar max

漏率

1x10^-9atm cc/sec He

机械

密封材料

Elastomer Seal

接液材料

316L Stainless Steel

High Alloy Stainless Steel

Viton® Fluoroelastomers

Buna-N

Kalrez®

Teflon®/Kalrez®

EPDM

阀门

Normally Closed

Normally Open

Meter (no valve)

诊断

诊断能力

Available

状态灯

MFC Health, Network Status

报警

Sensor Output

Control Valve Output

Over Temperature

Power Surge/Sag

Network Interruption

诊断/服务端口

RS485 via 2.5mm jack

电气

模拟通讯

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

数字通讯

DeviceNet™
EtherNet/IP™
FOUNDATION^TM Fieldbus
Profibus®
PROFINET
RS-485

电气连接

DeviceNet™: 1 x M12 with threaded coupling nut (B)

Profibus®: 1 x 15-pin Male Sub-D
1 x 9-pin female Sub-D

RS485: 1 x 15-pin Male Sub-D, (A)

电源-功耗

Analog / Profibus® / RS-485

Valve Orifice > 0.032": 8 Watts

Valve Orifice ≤ 0.032": 5 Watts

Without Valve: 2 Watts

DeviceNet™

Valve Orifice > 0.032": 10 Watts

Valve Orifice ≤ 0.032": 7 Watts

Without Valve: 4 Watts

承诺

认证和批准

ISO/IEC 17025:2005

CE: EMC, RoHs, PED

UL Listed/Recognized:

Class 1, Div 2, Group A,B,C,D

Class 1, Zone 2, IIC T4, Class II, Zone 22

ATEX:

II 3 G Ex nA IIC T4 Gc

II 3 D Ex tc IIIC T 85°C Dc

IECEx:

Ex nA IIC T4 Gc

Ex tc IIIC T 85°C Dc

KOSHA:

Ex nA IIC T4

Ex tc IIIC T85°C Dc

符合环保要求

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

大小

Large

	SLAMf50	SLAMf51	SLAMf53	SLAMf60	SLAMf61	SLAMf63	SLAMf64
产品类型	Mass Flow Controller	Mass Flow Controller	Mass Flow Controller	Mass Flow Meter	Mass Flow Meter	Mass Flow Meter	Mass Flow Meter
区别	Device Type Flow Range	Device Type Flow Range	Device Type Flow Range	Device Type Flow Range	Device Type Flow Range	Device Type Flow Range	Device Type Flow Range
流量范围-满量程容量	0.003 - 50 slpm	15 - 200 slpm	100 - 2500 slpm	0.003 - 50 slpm	15 - 200 slpm	100 - 2500 slpm	300 - 36,000 slpm
最大压力	1500 psi / 100 bar	1500 psi / 100 bar	1000 psi / 70 bar	1500 psi / 100 bar	1500 psi / 100 bar	1000 psi / 70 bar	Flow Rate Dependent
精度	±0.6% of SP	±0.6% of SP	100 - 1100 lpm ±0.6% of SP 1100 - 2500 lpm ±0.6% of FS	±0.6% of SP	±0.6% of SP	100 - 1100 lpm ±0.6% of SP 1100 - 2500 lpm ±0.6% of FS	±1.0% of FS
重复性	0.20% S.P.	0.20% S.P.	0.20% S.P.	0.20% S.P.	0.20% S.P.	0.20% S.P.	±0.25% S.P.
响应时间-常闭	<1 second	<1 second	<3 seconds	<1 second	<1 second	<3 seconds	N/A
多气体多量程	Standard	Standard	Standard	Standard	Standard	Standard	Standard
诊断能力	Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack	Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack	Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack	Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack	Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack	Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack	Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack
模拟通讯	0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA	0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA	0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA	0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA	0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA	0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA	0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA
数字通讯	DeviceNet™ EtherNet/IP™ FOUNDATION^TM Fieldbus Profibus® PROFINET RS-485	DeviceNet™ EtherNet/IP™ FOUNDATION^TM Fieldbus Profibus® PROFINET RS-485	DeviceNet™ EtherNet/IP™ FOUNDATION^TM Fieldbus Profibus® PROFINET RS-485	DeviceNet™ EtherNet/IP™ FOUNDATION^TM Fieldbus Profibus® PROFINET RS-485	DeviceNet™ EtherNet/IP™ FOUNDATION^TM Fieldbus Profibus® PROFINET RS-485	DeviceNet™ EtherNet/IP™ FOUNDATION^TM Fieldbus Profibus® PROFINET RS-485	DeviceNet™ EtherNet/IP™ FOUNDATION^TM Fieldbus Profibus® PROFINET RS-485

文件名	文件类型	文档语言
Data-Sheet-SLAMF	pdf	Chinese English French German Japanese
sla-series-biotech-at-a-glance	pdf	Chinese English German
Installation & Operation Manual	pdf	English Japanese
DeviceNet™ Supplemental Manual - SLA5800, SLAMf Mass Flow	pdf	English
EtherCAT® Supplemental Manual - SLA5800, SLAMf	pdf	English
EtherNet/IP™ Supplemental Manual (Prod Rev 4)	pdf	English
Profibus® Supplemental Manual - SLA5800, SLAMf	pdf	English
PROFINET Supplemental Manual - SLA5800, SLAMf	pdf	English German
RS485-S Supplemental Manual - SLA5800, SLAMf	pdf	English
Web-based Interface Supplemental Manual - SLA Series with EtherNet/IP™ or PROFINET	pdf	English

文件名	文件类型
SLAMF10-S-5A-1-Y-REVB	zip
SLAMF50-7-5A-1-A-REVB	zip
SLAMF50-7-5B-1-A-REVB	zip
SLAMF50-8-1E-4-A-RevB	zip
SLAMF50-8-1P-1-A	zip
SLAMF50-A-1P-1-Y-REVB	zip
SLAMF50-D-1E-1-A-REVB	zip
SLAMF50-D-1M-1-A-REVB	zip
SLAMF50-R-5B-1-A-REVB	zip
SLAMF50-S-1B-1-G-RevB	zip
SLAMF50-S-1B-1-K-REVB	zip
SLAMF50-S-1F-1-K-RevB	zip
SLAMF50-S-1L-1-F-REVB	zip
SLAMF50-S-T1-1-Y-REVB	zip
SLAMF51-7-1G-1-A-REVB	zip
SLAMF51-8-1A-1-A-REVB	zip
SLAMF51-S-1D-1-K-REVB	zip
SLAMF51-S-1L-1-F-REVB	zip
SLAMF51-S-1P-1-K-REVB	zip
SLAMF51-S-T1-1-Y-REVB	zip
SLAMF53-7-2B-3-A-REVB	zip
SLAMF53-7-2L-3-A-REVB	zip
SLAMF53-8-2B-3-A-REVB	zip
SLAMF53-8-2M-3-A-REV B	zip
SLAMF53-A-2E-2-Y-REVB	zip
SLAMF53-D-2K-3-A-RevB	zip
SLAMF53-P-2X-2-A-RevB	zip
SLAMF53-S-2B-3-K-REVB	zip
SLAMF53-S-2C-2-K-REVB	zip
SLAMF53-S-2D-2-K-REVB	zip
SLAMF53-S-2D-2-Y-REVB	zip
SLAMF53-S-2D-3-G-REVB	zip
SLAMF53-S-2E-2-G-REVB	zip
SLAMF53-S-2E-2-K-REVB	zip
SLAMF53-S-2E-2-Y-REVB	zip
SLAMF53-S-2F-1-G-REVB	zip
SLAMF53-S-2G-2-F-REVB	zip
SLAMF53-S-2H-2-F-REVB	zip
SLAMF53-S-2L-2-K-REVB	zip
SLAMF53-S-2M-2-F-REVB	zip
SLAMF53-S-2P-2-G-REVB	zip
SLAMF53-S-2P-2-Y-REVB	zip
SLAMF53-S-2X-3-G-REVB	zip
SLAMF53-S-3A-3-G-REVB	zip
SLAMF53-S-3B-3-G-REVB_igs	zip
SLAMF53-S-3B-3-Y-REVB	zip
SLAMF53-S-5C-3-G-REVB	zip
SLAMF53-S-5D-3-G-REVB	zip
SLAMF60-3-1E-0-A-REVB	zip
SLAMF60-7-5A-0-A-REVB	zip
SLAMF60-P-5B-01-REVB	zip
SLAMF60-Q-1M-0-A-REVB	zip
SLAMF60-S-1E-0-K-REVB	zip
SLAMF60-S-1G-0-G-RevB	zip
SLAMF60-S-1L-0-K-REVB	zip
SLAMF60-S-1P-0-K-REVB	zip
SLAMF60-S-5A-0-Y-REVB	zip
SLAMF60-S-5B-0-G-REVB	zip
SLAMF60-S-B1-0-Y-RevB	zip
SLAMF60-S-G1-0-K-REVB	zip
SLAMF61-R-1J-0-A-REVB	zip
SLAMF61-S-1G-0-K-REVB	zip
SLAMF61-S-1P-0-K-REVB	zip
SLAMF63-8-2B-0-A-REVB	zip
SLAMF63-P-2E-0-K-RevB	zip
SLAMF63-S-2D-0-G-REVB	zip
SLAMF63-S-2E-0-K-RevB	zip
SLAMF63-S-2G-0-G-REVB	zip
SLAMF63-S-2M-0-G-REVB	zip
SLAMF63-S-2N-0-G-REVB	zip
SLAMF63-S-2U-0-K-REVB	zip
SLAMF63-S-3J-0-G-RevB	zip
SLAMF63-T-2U-0-A-RevB	zip
SLAMF64-R-3R-0-A-REVA	zip
SLAMF64-S-2W-0-G-REVB	zip
SLAMF64-S-3L-0-K-REVA	zip
SLAMF64-S-3P-0-K-REVB	zip
SLAMF64-S-4A-0-K-REVB	zip

0250 读数应用

Controls and powers up to 4 devices

0260 系列

Controls and monitors up to 30 devices, powers up to 10 devices.

Brooks Expert Support Tool (BEST)

A Windows™ based application providing expanded control of Brooks Instrument MFCs and Pressure Controllers.

Brooks LabVIEW™ DLL

能让用户与布鲁克斯的数字质量流量控制计，压力控制计和二次仪表建立通讯。DLLs是在用户需要在LabVIEW™创建自己新的应用时使用。

Smart DDE 软件

Dynamic Data Exchange software allows user to make bi-directional links between Windows® based applications and Brooks Instrument RS485 S-Protocol devices.

SLAMf 系列橡胶密封热式质量流量计和控制器

如有疑问

特点

优势

应用

布鲁克斯仪器

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