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Products Mass Flow Controllers Elastomer Sealed SLAMf Series
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SLAMf Series Mass Flow Meters & Controllers for Gases

Precision mass flow control. Hardened for the harshest environments. Now available with EtherNet/IP™ and PROFINET.
Models SLAMf50 / SLAMf51 / SLAMf53 / SLAMf60 / SLAMf61 / SLAMf63 / SLAMf64

Whether it’s dust, moisture, temperature extremes or washdown requirements, the SLAMf Series elastomer sealed thermal mass flow controllers and meters deliver the precise accuracy and long-term stability of our proven SLA5800 family of meters and controllers. A specially engineered IP66 enclosure protects our advanced digital electronics and ensures stable, accurate measurement and control of your process-critical gas mass flows.

Learn more about selecting MFCs for rugged and hazardous environments from this Brooks Instrument article in Process Instrumentation, including tips on key features, diagnostic capabilities, understanding classifications for hazardous areas and more.

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


For pricing information:

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SLAMf Series Data Sheet

Features

  • ISO/IEC 17025 accredited
  • SLA Series Biotech MFC offers two options packages with features created specifically to improve bioprocessing performance. See which package is right for your process.
  • IP66 rated hardened enclosure
  • Wide range of full scale flows - from 0.003 up to 2500 lpm (36,000 lpm for meters)
  • Suitable for a broad range of temperature and pressure conditions
  • Industry-leading thermal flow measurement sensor technology delivers excellent accuracy
  • Broad array of available communication options now includes the EtherNet/IP™ protocol which features a web-based interface that lets you easily configure network settings
  • Programmable multi-gas/multi-range capabilities
  • Advanced self-test routines and an independent diagnostic service port lets users troubleshoot or change flow conditions without removing the MFC from service

Benefits

  • Hardened device housing ensures process accuracy and control in harsh conditions
  • Proprietary thermal sensing technology delivers superior signal to noise ratio at low set points
  • Long-term sensor stability reduces maintenance and periodic recalibration requirements
  • Choose one device, program up to six different gas calibrations
  • Enhanced valve shut-off, wide turndown, certifications and approvals (USP Class VI/ADI-free) for all elastomeric material in the gas stream (wetted path), including valve seats and o-rings, are available with the SLA Series Biotech MFC
  • User-accessible service port simplifies installation, troubleshooting and diagnostic tasks
  • Excellent accuracy backed by superior metrology systems and calibration based on global standards
  • EtherNet/IP™ and PROFINET permit multiple, additional diagnostics beyond those provided by the mass flow controller alone, giving users rich, real-time system information
  • ISO/IEC 17025 certification and calibration available with flow accuracy of ±0.6% of SP
  • Traceable calibrations to meet industry standards and regulatory requirements

Applications

  • Life sciences
  • Chemical and petrochemical pilot plants
  • Blanketing in food processing
{4D39703F-8431-4E00-AAAF-E32A63224B73}
Product Type
Mass Flow Controller
{D253B33E-C5F3-4DDA-BD34-73FFC0C232FA}
Differentiator

IP66 Approved Enclosure

Perfect for Hose Down/Wash Down Applications

Hazardous Area Approvals

 

{67DC4ABD-6777-4374-A573-7D0D966C728D}
Performance
{9AAFFE42-6B76-4D6E-93E5-BECEAA6F8668}
Flow Range (Full Scale Capacity)
.003 - 2500 slpm
{0B64BBEC-4BB7-4FED-9357-592DD5690A75}
Accuracy

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20-100% FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS


Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20-100% FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

{26C11D89-3C54-4E7D-8888-5556E24F7DE1}
Repeatability

0.20% SP

{1D81766F-E683-411F-B8B7-7DF8FB04B1AF}
Linearity

Included in Accuracy

{4CF87FD8-F072-4D48-A130-093BC919EBAE}
Response Time

<1 second up to 100 lpm

<3 seconds up to 2500 lpm

{7F7303B9-21F0-4DB8-B19A-DD6744F98098}
Multi-Gas & Range Configurability

Standard

{5786AAD7-7C1E-4073-98EF-2E9C159850E3}
Max Pressure

Up to 100 lpm: 1500 psi/100 bar

Up to 50 lpm: 4500psi/310 bar (optional)

100-2500 lpm:  1000 psi/70 bar

{7FC46212-0BAA-4696-B5DA-9170F8547A94}
Control Range

1-50 slpm: 100:1 Turndown for F.S.

50-2500 lpm: 50:1 Turndown for F.S.

{5F2CA8BE-E327-46C6-A3BB-0D820D401F43}
Zero Stability

< 0.2% F.S. per year

{036F2FE9-02A0-4D8B-8038-2E478D431EE1}
Flow Temperature Coefficient

Zero: <0.05% of F.S. per °C

Span: < 0.1% of S.P. per °C

{5E5CD617-7F04-4615-8737-FE8E3FFE18E9}
Pressure Coefficient

±0.03% per psi (0-200 psi N2)

{836190EB-84E2-4D7B-B0A8-E3755CCD2B95}
Attitude Sensitivity

<0.2% F.S. maximum deviation from specified accuracy after re-zeroing

{636DEA02-86E7-4C2A-99C4-A35955A98A42}
Ratings
{926B9E2B-B423-48C5-B970-149010D48B39}
Max Temperature
65oC
{7688D2A8-C7B4-4E0B-99C6-A09793B8432B}
Differential Pressure Range

Controllers

Up to 50 lpm: 5 psi/0.35 bar min - 1500 psi/103.4 bar max

50-100 lpm: 10 psi/0.69 bar min -  50 psi/3.45 bar max

500 lpm: 7.5 psi/0.52 bar min - 300 psi/20.0 bar max

1000 lpm: 14.5 psi/1.00 bar min - 300 psi/20.0 bar max

2500 lpm: 35.0 psi/2.41 bar min - 300 psi/20.0 bar max

 

{5A7962B1-CCBE-433E-9949-3A00D3E1CCEB}
Leak Integrity
1x10-9 atm cc/sec He
{FD1D1004-5C0F-4B63-932C-35138114F6EA}
Mechanical

{564301AE-2597-47D3-B01A-D1EA5035CE62}
Seal Material
Elastomer Seal
{E25F7667-7768-49A8-BC0A-E0825FA74744}
Wetted Materials

316L Stainless Steel

High Alloy Stainless Steel

Viton® Fluoroelastomers

Buna-N

Kalrez®

Teflon®/Kalrez®

EPDM

{F382B259-19AC-405F-B302-6B9714656C5C}
Valve Options

Normally Closed

Normally Open

Meter (no valve)

{E453CD3F-EB1B-46A0-9AB5-289E0F2F94F0}
Diagnostics

 

{C2E26E76-7B9F-4B24-9F5E-CBA3D18D1EC0}
Diagnostic Capability
Available

{C3E267C1-0306-43D2-81C0-4E56D6E3631C}
Status Lights

MFC Health, Network Status

{C6339274-4BFE-4E18-8B94-C9FA3F25F2A2}
Alarms

Sensor Output

Control Valve Output

Over Temperature

Power Surge/Sag

Network Interruption

{8BE7F605-87D9-4DB9-BB89-ABD70731BEB2}
Diagnostic / Service Port

RS485 via 2.5mm jack

{53E159A3-B49E-43ED-981A-019A342A4332}
Electrical

{8B595ECE-164D-4211-B642-A97342BB1B00}
Analogue Communication
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA
{04455110-D658-42D9-B6F0-121BA12BAAFB}
Digital Communication
DeviceNet™
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485 
{9225A0F9-07BD-427C-B176-FC5179F41675}
Electrical Connection

DeviceNet™: 1 x M12 with threaded coupling nut (B)

Profibus®: 1 x 15-pin Male Sub-D
1 x 9-pin female Sub-D

RS485: 1 x 15-pin Male Sub-D, (A)

{71103481-4143-41CD-8B6E-75BB5C0B18B1}
Power Supply / Consumption

Analogue / Profibus® / RS-485

Valve Orifice > 0.032": 8 Watts

Valve Orifice ≤ 0.032": 5 Watts

Without Valve: 2 Watts

DeviceNet™

Valve Orifice > 0.032": 10 Watts

Valve Orifice ≤ 0.032":  7 Watts

Without Valve: 4 Watts

{5B59C62B-86F8-4735-A7B7-52F770F486E3}
Compliance
{69B425DA-C564-46AC-BFDF-92D19720A61D}
Certifications/Approvals

ISO/IEC 17025:2005

CE: EMC, RoHs, PED

UL Listed/Recognised:

Class 1, Div 2, Group A,B,C,D

Class 1, Zone 2, IIC T4, Class II, Zone 22

ATEX:

II 3 G Ex nA IIC T4 Gc 

II 3 D Ex tc IIIC T 85°C Dc

IECEx:

Ex nA IIC T4 Gc 

Ex tc IIIC T 85°C Dc 

KOSHA:

Ex nA IIC T4

Ex tc IIIC T85°C Dc

{76045893-80DF-43BE-B8AD-00E586A83EDD}
Environmental Compliance

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

{1109E7B2-CEF9-4302-8A6E-E217BF7B1706}
Size
Large
SLAMf50 SLAMf51 SLAMf53 SLAMf60 SLAMf61 SLAMf63 SLAMf64
Product Type Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Meter Mass Flow Meter Mass Flow Meter Mass Flow Meter
Differentiator

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Flow Range (Full Scale Capacity) 0.003 - 50 slpm 15 - 200 slpm 100 - 2500 slpm 0.003 - 50 slpm 15 - 200 slpm 100 - 2500 slpm 300 - 36,000 slpm
Max Pressure 1500 psi / 100 bar 1500 psi / 100 bar 1000 psi / 70 bar 1500 psi / 100 bar 1500 psi / 100 bar 1000 psi / 70 bar Flow Rate Dependent
Accuracy

±0.6% of SP

±0.6% of SP

100 - 1100 lpm

±0.6% of SP

1100 - 2500 lpm

±0.6% of FS

±0.6% of SP

±0.6% of SP

100 - 1100 lpm

±0.6% of SP

1100 - 2500 lpm

±0.6% of FS

 ±1.0% of FS
Repeatability 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. ±0.25% S.P.
Response Time <1 second <1 second <3 seconds <1 second <1 second <3 seconds N/A
Multi-Gas & Range Configurability Standard Standard Standard Standard Standard Standard Standard
Diagnostic Capability

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack
Analogue Communication

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA
Digital Communication

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485
Filename File Type Documents By Language
Data Sheet pdf Chinese English French German Japanese
SLA Biotech MFC At-a-Glance pdf Chinese English German
Installation & Operation Manual pdf English Japanese
DeviceNet™ Supplemental Manual - SLA5800, SLAMf Mass Flow pdf English
EtherCAT® Supplemental Manual - SLA5800, SLAMf pdf English
EtherNet/IP™ Supplemental Manual (Prod Rev 4) pdf English
Profibus® Supplemental Manual - SLA5800, SLAMf pdf English
PROFINET Supplemental Manual - SLA5800, SLAMf pdf English German
RS485-S Supplemental Manual - SLA5800, SLAMf pdf English
Web-based Interface Supplemental Manual - SLA Series with EtherNet/IP™ or PROFINET pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: SLAMf60 - S - B1 - 0 - Y - RevB

Meter Series
Digital Communications I/O
 		Mechanical Connection
(Body size 0 & 1 only)
 		Valve Type
 		Analog Communications I/O
 		Revision Level
 SLAMf5x  S - RS485 (select applicable analog I/O)
  B1 - 1/4” tube compression w/Filter
  0 - None (Sensor only)
  Y - 4-20 mA / 0-5 V M20x1.5 Conduit
  RevB
 SLAMf6x
 
      

 *See data sheet for more options

 

Filename File Type
SLAMF10-S-5A-1-Y-REVB zip
SLAMF50-7-5A-1-A-REVB zip
SLAMF50-7-5B-1-A-REVB zip
SLAMF50-8-1E-4-A-RevB zip
SLAMF50-8-1P-1-A zip
SLAMF50-A-1P-1-Y-REVB zip
SLAMF50-D-1E-1-A-REVB zip
SLAMF50-D-1M-1-A-REVB zip
SLAMF50-R-5B-1-A-REVB zip
SLAMF50-S-1B-1-G-RevB zip
SLAMF50-S-1B-1-K-REVB zip
SLAMF50-S-1F-1-K-RevB zip
SLAMF50-S-1L-1-F-REVB zip
SLAMF50-S-T1-1-Y-REVB zip
SLAMF51-7-1G-1-A-REVB zip
SLAMF51-8-1A-1-A-REVB zip
SLAMF51-S-1D-1-K-REVB zip
SLAMF51-S-1L-1-F-REVB zip
SLAMF51-S-1P-1-K-REVB zip
SLAMF51-S-T1-1-Y-REVB zip
SLAMF53-7-2B-3-A-REVB zip
SLAMF53-7-2L-3-A-REVB zip
SLAMF53-8-2B-3-A-REVB zip
SLAMF53-8-2M-3-A-REV B zip
SLAMF53-A-2E-2-Y-REVB zip
SLAMF53-D-2K-3-A-RevB zip
SLAMF53-P-2X-2-A-RevB zip
SLAMF53-S-2B-3-K-REVB zip
SLAMF53-S-2C-2-K-REVB zip
SLAMF53-S-2D-2-K-REVB zip
SLAMF53-S-2D-2-Y-REVB zip
SLAMF53-S-2D-3-G-REVB zip
SLAMF53-S-2E-2-G-REVB zip
SLAMF53-S-2E-2-K-REVB zip
SLAMF53-S-2E-2-Y-REVB zip
SLAMF53-S-2F-1-G-REVB zip
SLAMF53-S-2G-2-F-REVB zip
SLAMF53-S-2H-2-F-REVB zip
SLAMF53-S-2L-2-K-REVB zip
SLAMF53-S-2M-2-F-REVB zip
SLAMF53-S-2P-2-G-REVB zip
SLAMF53-S-2P-2-Y-REVB zip
SLAMF53-S-2X-3-G-REVB zip
SLAMF53-S-3A-3-G-REVB zip
SLAMF53-S-3B-3-G-REVB_igs zip
SLAMF53-S-3B-3-Y-REVB zip
SLAMF53-S-5C-3-G-REVB zip
SLAMF53-S-5D-3-G-REVB zip
SLAMF60-3-1E-0-A-REVB zip
SLAMF60-7-5A-0-A-REVB zip
SLAMF60-P-5B-01-REVB zip
SLAMF60-Q-1M-0-A-REVB zip
SLAMF60-S-1E-0-K-REVB zip
SLAMF60-S-1G-0-G-RevB zip
SLAMF60-S-1L-0-K-REVB zip
SLAMF60-S-1P-0-K-REVB zip
SLAMF60-S-5A-0-Y-REVB zip
SLAMF60-S-5B-0-G-REVB zip
SLAMF60-S-B1-0-Y-RevB zip
SLAMF60-S-G1-0-K-REVB zip
SLAMF61-R-1J-0-A-REVB zip
SLAMF61-S-1G-0-K-REVB zip
SLAMF61-S-1P-0-K-REVB zip
SLAMF63-8-2B-0-A-REVB zip
SLAMF63-P-2E-0-K-RevB zip
SLAMF63-S-2D-0-G-REVB zip
SLAMF63-S-2E-0-K-RevB zip
SLAMF63-S-2G-0-G-REVB zip
SLAMF63-S-2M-0-G-REVB zip
SLAMF63-S-2N-0-G-REVB zip
SLAMF63-S-2U-0-K-REVB zip
SLAMF63-S-3J-0-G-RevB zip
SLAMF63-T-2U-0-A-RevB zip
SLAMF64-R-3R-0-A-REVA zip
SLAMF64-S-2W-0-G-REVB zip
SLAMF64-S-3L-0-K-REVA zip
SLAMF64-S-3P-0-K-REVB zip
SLAMF64-S-4A-0-K-REVB zip
0250 Series
0250 Series
Controls and powers up to 4 devices
0260 Series
0260 Series
Controls and monitors up to 30 devices, powers up to 10 devices.
Brooks Expert Support Tool (BEST)
Brooks Expert Support Tool (BEST)
A Windows™ based application providing expanded control of Brooks Instrument MFCs and Pressure Controllers.
Brooks LabVIEW™ DLL
Brooks LabVIEW™ DLL

Enables users to set-up communication with Brooks® digital mass flow controllers, pressure controllers and secondary electronics. The DLLs are to be used when creating your own application in LabVIEW™.

Smart DDE
Smart DDE

Dynamic Data Exchange software allows user to make bi-directional links between Windows® based applications and Brooks Instrument RS485 S-Protocol devices.