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Product Type
Mass Flow Controller
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Differentiator
Large installed base with proven long term performance
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Flow Range (Full Scale Capacity)
3 sccm - 30,000 sccm
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Accuracy
1% F.S. incl. linearity
1.5% F.S. incl. linearity >20 slpm
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Linearity
±0.5% F.S. (included in accuracy)
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Response Time
Normally Closed Valve: <3 sec
Optional: 600 msec
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Multi-Gas & Range Configurability
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Pressure Transient Insensitivity
—
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Zero Stability
< ±0.5% F.S. per year
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Level of Purity / Surface Finish
316L VAR, 316L, and high alloy
ferritic stainless steel
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Wetted Materials
Valve Seat: 316L, Viton® fluoroelastomers, Buna-N, Kalrez® or Teflon®
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Valve Options
Normally Closed, Normally Open
Meter (no valve)
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Differential Pressure Range
5 - 50 psi (gas and range dependent)
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Leak Integrity
1x10-10 atm cc/sec He
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Status Lights
MFC Health, Network Status
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Alarms
Control Valve Output, Network Interruption
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Diagnostic / Service Port
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Electrical Connection
15 Pin D Connector (DA-15P)
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Power Supply / Consumption
Normally Closed valve: 3.25 watts
Normally Open valve: 10.5 watts
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