Pressure & Vacuum Products

Innovative vacuum and pressure measuring instruments. World-class accuracy and reliability.

Wondering how to control pressure in your industrial applications? Any time you are measuring flow, you probably also need to measure pressure or vacuum – and we can help. For decades, Brooks Instrument has been a leader in flow measurement and control technology. Today, we are a global leader in precision fluid measurement and control that includes a proven portfolio of pressure instrument and vacuum transducers, gauges, controllers, regulators and capacitance manometers to satisfy the most demanding process requirements.

Featuring world-class accuracy and repeatability, our vacuum and pressure control products can help you fine-tune the results your processes deliver.

Our vacuum and pressure controller technology is used by semiconductor OEMs, gas cabinet suppliers and vacuum controller system manufacturers including thin-film deposition systems and high-tech specialty furnaces. Our portfolio includes regulators and sensors that precisely measure and control pressures ranging from vacuum to 3000 psi; we have technology that will solve your gas and vacuum sensing and regulating challenges with:

  • Ultra-high purity pressure and vacuum transducers for the most stringent gas measuring challenges
  • Stainless steel pressure control gauges, switches and transmitters for local measurement that is accurate and cost-effective
  • Industry-leading, high-accuracy capacitance manometers for controlling the most critical vacuum processes
Brooks SolidSense II Pressure Transducer Cutaway
SolidSense II® - Pressure Transducer
{356B79A7-863B-4B19-98B0-658ACA0B847B}
Pressure Range
-15 psi - 4,000 psi
{739E7747-2A7E-4788-BE13-9B3AAF0DDA27}
Accuracy
1% Full Scale
{D534F9F0-7A45-4293-B998-A6917B55D8D7}
Materials of Construction
Aluminum or Stainless Steel
{BA074B6A-485A-4CE3-A3EB-5C04C9C4F7DC}
Pressure Range

-15 psi - 3000 psi

{7157D8A9-445E-4F69-8B1E-918539254A72}
Accuracy

0.25 % Full Scale

{F30150AF-2490-4CA2-A1C3-3291C494E184}
Certifications/Approvals
CE, FM and ATEX
{262157F8-8307-4717-9BFA-FDA3DCBAD71E}
Max Pressure
4500 psia
{9323D055-7373-4A2C-BE85-632CB83C776F}
Max Temperature
65°C
{CF8B04E0-A6E5-48D5-8F84-09E5C1068DE7}
Max Pressure
500 psig
{F2821B7C-4CE5-4773-B41D-7841E464D9CF}
Temperature
65°C
{707FF7FA-586A-4973-8576-D53278DB922B}
Pressure Range

100 mTorr- 1000 Torr

{D194DD87-9B67-4022-BD9C-9263278778C4}
Accuracy

0.15 - 0.2% of Reading

{7B1ED68C-8968-44E2-AB13-C2042424D85F}
Temperature Range
Ambient - 160 oC