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Pressure Transmitters, Vacuum Pressure Gauges, Meters & Controllers

Innovative vacuum and pressure measurement with world-class reliability.

Forged from over 70 years of instrumentation expertise, Brooks Instrument pressure transmitters and vacuum pressure gauges and meters are built for performance in high-stakes environments. Our devices feature advanced sensor technology, producing rapid response times and long-term stability. Whether you're working in vacuum chambers or cleanrooms with high-purity applications, our transmitters and gauges are engineered to deliver durability, repeatability and low drift over time. Plus, our pressure measurement instruments are built to require minimal maintenance and provide a long lifespan, helping reduce your total cost of ownership.

Our instruments thrive in semiconductor, life sciences and industrial vacuum applications such as:

  • Semiconductor manufacturing tools
  • Cleanroom environmental monitoring
  • Lab gas control
  • Pharmaceutical packaging
  • Laboratory and R&D process instrumentation
  • Vacuum deposition systems
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Brooks SolidSense II Pressure Transducer Cutaway
SolidSense II® - Pressure Transducer
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Pressure Range

100 mTorr- 1000 Torr

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Accuracy

0.15 - 0.2% of Reading

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Temperature Range
Ambient - 160 oC
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Pressure Range

-15 psi - 5,000 psi

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Accuracy

±0.25 % Full Scale (BFSL)

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Certifications/Approvals
ATEX, EMC, REACH, RoHS
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Max Pressure
1000 Torr
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Temperature
50°C
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Max Pressure
4500 psia
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Max Temperature
65°C
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Pressure Range

7.5x10-7 to 1000 Torr

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Accuracy

0.25 - 0.5% of Reading

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Temperature
Ambient - 50 oC
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Pressure Range
-15 psi - 4,000 psi
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Accuracy
1% Full Scale
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Materials of Construction
Aluminum or Stainless Steel