CMC Series Capacitance Manometers

Compact, proven unheated gauges for cost-effective vacuum measurement.
Models CMC

CMC Series capacitance manometers from Brooks Instrument deliver reliable, accurate vacuum measurement over a wide range of operating temperatures, providing an economical alternative to larger premium unheated gauges. Its compact design and proven performance make it an ideal upgrade for existing tools needing a small form-factor gauge.

Reliable and repeatable operation is assured in even the most aggressive processes through the all-welded design and Iconel® wetted surfaces. The combination of precision components and a wide temperature compensated operating range lets Brooks deliver best-in-class zero and span temperature coefficients for optimum measurement stability. 

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CMC Series Data Sheet

Features

  • Available for process ranges from 10 Torr to 1000 Torr
  • Two accuracy levels available: 0.25% or 0.50% of reading (optional)
  • Exceptional performance over a wide range of operating temperatures
  • 40% smaller than traditional unheated capacitance manometers
  • All-welded construction and Inconel® wetted surfaces

Benefits

  • Optional high accuracy calibration matches the accuracy of more costly premium unheated manometers
  • Best-in-class zero and span temperature coefficients
  • Space-saving design helps fit device into tight machine spaces
  • Optimum measurement repeatability compared to other designs that are prone to error inducing internal stresses

Applications

  • Semiconductor fabrication
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)
{0DF4297E-595A-44FD-AF65-9A934C31ACAC}
Product Type
Capacitance Manometer
{B1A08C84-A267-4F23-945B-F1A5ADBD3FB5}
Differentiator

Unheated

{C26839BD-140E-42BA-854A-0C59280A15D3}
Performance
{5916886C-D125-4AA9-82E7-82A77FD490B8}
Temperature
Ambient
{BDCEAC2C-5A26-44CA-9B51-EE0F6B898DD9}
Pressure Range

10, 20, 50, 100 and 1000 Torr Full Scale

{280A2B6A-8F5D-434B-AE37-1DD9E164F1C4}
Accuracy

Type A = 0.25% of Reading

Type B = 0.50% of Reading

{F474B181-6C3E-47D8-9152-CE6C09E7DF33}
Measurement Range
4 Decades
{022E9C74-CEB5-4C37-A4C1-40B63D4B6338}
Temperature Effect

On Zero

0.002% FS / °C

 

On Span

0.027% FS / °C

{DA8BE2AB-1119-47C3-8E0F-ED250337BF0E}
Mechanical
{19A71DCF-81CB-46CD-9657-9B99487CB454}
Exposed Materials
Inconel
{A8E6AD51-9742-4D19-8150-1BD03E4F5181}
Over Pressure Limit
45 psia
{42FDCA39-1BB2-4ECB-8209-1E36F04CC65E}
Size
Compact
{D42451F7-6334-475D-83D6-B40E1FC56F09}
Electrical
{90CDF7B1-B174-4717-B96F-B12D23BCE802}
Analog Communication

0-10 Vdc (<10k Ohm load)

{FB0DFCA3-2D5A-4921-9568-A3C547C07CA8}
Digital Communication

{13455EAA-890F-438F-98A6-9CD19D845BAF}
Electrical Connection

15-Pin DSub on 6” cable

9-Pin DSub

5-Pin terminal strip

{7E9A7594-928B-41E4-9C30-C34A5F686A73}
Power Supply / Consumption
< 200 mW
{2A1D4FF4-7EBC-4539-8374-8FD1FC582CA2}
Certifications/Approvals
{47264937-B8AD-4FB5-AB52-3ED06FA84DD9}
EMC

CE

Directive 89/336/EEC

{DF2C7048-E381-48D2-B90B-7DC86F0941FF}
Environmental Compliance

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

CMC
Temperature Ambient
Pressure Range 10, 20, 50, 100 and 1000 Torr Full Scale
Accuracy

±0.25% of reading

±0.50% of reading (optional)

Analog Communication 0 - 10 Vdc
Digital Communication
Filename File Type Documents By Language
Data Sheet pdf English
Installation & Operation Manual pdf English
CE EU Declaration of Conformity Certificate pdf English Korean Romanian Russian Spanish