SLA7840 Metal Sealed Pressure Controller & Flow Meter

High purity flow path. Superior repeatability, stability and response time.
Models SLA7840

The Brooks model SLA7840 is a high purity metal sealed instrument that controls pressure while measuring flow rate. A remote pressure transducer signal, along with adjustable integral PID control electronics and a co-planar control valve, maintains the desired set pressure. The co-planar valve reduces sensitivity to pressure variations and offers lower leak-by rates compared to other metal sealed controllers ensuring a more stable process over time.

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SLA7840 Data Sheet

Features

  • Integral pressure transducer
  • Response time: <1 second
  • Wide flow measurement range with full-scale flow rates from 0 - 3 sccm to 0 – 30,000 sccm
  • Max pressure 500 psig
  • All-metal seal flow path: 32µ inch Ra maximum surface finish
  • Co-planar valve offers lower leak-by rates
  • Multi-gas/multi-range capability allows for storage and pre-programming of up to 10 gas calibrations and ranges on a single device
  • DeviceNet® and analog communication options

Benefits

  • Larger co-planar valve control range reduces sensitivity to pressure variations in the process, ensuring a more stable process over time
  • All metal wetted flow path to maintain particle, moisture and contamination free process conditions
  • Device can also be configured as a mass flow controller for calibration or test purposes
  • Multi-gas/multi-range capability reduces inventory
  • Greater control range provided by co-planar valve decreases number of parts needed to control the process
  • Compact, space saving footprint is easily retrofitable
  • Digital communication offers easy commissioning and reduced system wiring
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Product Type

Pressure Controller & Flow Meter

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Differentiator

Control Mode: Downstream or Upstream

Remote Transducer

Wide Flow & Pressure Range

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Performance
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Flow Range (Full Scale Capacity)

Any range from 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.

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Accuracy

±1% of rate 20-100% F.S.

±0.2% F.S. < 20% F.S.

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Repeatability

±0.2% of rate

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Flow Temperature Coefficient

Zero: Less than 0.035% FS per °C

Span: Less than 0.1% of Rate per °C

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Pressure Range
Dependent upon remote pressure transducer, maximum 500 psig.
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Pressure Control Range

20:1

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Response Time

< 1 sec typical for a 20-100% setpoint step with max 2% overshoot.

Actual pressure response depends on system design.

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Ratings


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Max Pressure
500 psig
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Ambient Temperature Range

Operating: 0°C to 60°C

Non-Operating: -25°C to 100°C

Fluid: 0°C to 65°C

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Leak Integrity

Inboard to Outboard

1 x 10-10 atm scc/sec Helium max

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Mechanical
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Seal Material
Metal
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Level of Purity / Surface Finish

32 µ inch Ra

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Wetted Materials

316L Vacuum Arc Remelt (VAR)

316L

High-Alloy Ferritic Stainless Steel

External/Internal Seals: Nickel

Valve Seat: 316L Stainless Steel - standard

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Valve Options

Normally Closed

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Electrical
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Diagnostic Capability
Available

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Analog Communication

0 - 5 Vdc

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Digital Communication
DeviceNet™
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Electrical Connection

Analog via 15-Pin "D" Connector

DeviceNet™ via 5-Pin "M12" Connector

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Power Supply / Consumption

Analog: +15 Vdc, ±5% (traditional -15 Vdc pin is ignored)

DeviceNet™: 11 - 25 Vdc

SLA7840
Flow Range (Full Scale Capacity)

Any range from 0 to 3 sccm to 0 to 30,000 sccm N2 Eq. 

Pressure Control Range

20:1

Max Pressure

500 psig

Seal Material

Metal

Electrical Connection

15-Pin "D" Connector

5-Pin "M12" Connector

Filename File Type Documents By Language
Data Sheet pdf English
Installation & Operation Manual pdf English
Supplemental Manual - DeviceNet™ pdf English