{DFB7EFFB-5600-40FD-8FA7-B1F69102139C}
Product Type
Tri Sensor: MEMS Pirani, Capacitance & Piezo Diaphragms
{5A7CDAB6-F382-44CC-97A2-C502448FB9B8}
Differentiator
Capacitance and Piezo diaphragm sensors provide extended high-accuracy direct vacuum measurement for process control
{8219742C-B7A3-46D1-AE7D-016AB3A79C06}
{D836ADFE-8D3D-42C0-8204-302AF64D2508}
Temperature
Ambient - 50 oC
{591CB416-9383-4509-84C1-FF3960FA7E29}
Pressure Range
7.5x10-7 Torr through 1000 Torr
{AA6DB350-3F88-4C0F-8D9A-807F2FB2B1D1}
Accuracy
7.5x10-5 to7.49x10-3 Torr: ±5%
7.5x10-3 to7.49 Torr: ±0.5%
7.50 to 7.49 Torr: ±0.5%
75 Torr to 1000 Torr: ≤±0.5%
{90C623CA-2D6E-4878-B5EC-2A9F8454596B}
Measurement Range
9 Decades
{5CC55ECD-DAFC-4265-BD4F-7BD1EB629398}
{69EE06CE-2065-4089-9813-67A6CC51393D}
{EB9AF386-B901-4966-AE43-333E9511DD28}
Exposed Materials
304 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton®, low out-gassing epoxy resin, solder, RO4305
{F5E53333-29C5-4D9D-855A-F0F9F3AEA7CD}
Over Pressure Limit
4 bar absolute
{CA10224B-1D14-4CA2-9397-2E50B4E97970}
{93DB7045-32D0-4A3E-93E7-8E6C4099620D}
{885710F8-FE63-4A16-9B7A-52F5DE8A2D97}
Analog Communication
0.5-9.5 Vdc (1V per decade)
{DFB2739D-EF88-44E4-BF83-3B35971A5A6D}
{7A211D5B-53B6-4FE7-8F3F-247DD7977C04}
Electrical Connection
9 Pin D-sub male: BVT120 Series only
15 pin HD D-sub male
15 pin HD D-Sub male / dual analog out
6 pin Hirschmann, ID res 3K: BVT120 Series only
6 pin Hirschmann, ID res 5.1K: BVT120 Series only
6 pin Hirschmann, ID res 9.1K/11.1K: BVT120 Series only
8 pin RJ45 / FCC68, ID Res 27K: BVT120 Series only
8 pin RJ45 / FCC68, ID Res 36K: BVT120 Series only
8 pin RJ45 / FCC68, ID Res 43K: BVT120 Series only
{1C900F0D-5422-4AB6-BDFA-FC982EB7D4C5}
Power Supply / Consumption
350 mW (max)
{8D459843-D95A-421B-8B8A-401527CD0F22}
{2031247E-4253-4C4B-BB4A-856085B9BAA2}
EMC
Directive EU 2015/863 EMC directive 2014/30/EU