122 Series Mechanical Pressure Gauges

Reliable, efficient local pressure monitoring for high-purity applications.
Models S122 / C122 / F122

The Brooks Instrument 122 Series mechanical pressure gauges were designed and developed for the demanding high-purity applications of the semiconductor industry. Made of stainless steel, our mechanical pressure gauges feature an accuracy of 1% of full scale. These two inch gauges are durable measuring devices that come in a variety of process connections, pressure ranges, and socket orientations, offering a reliable and efficient way to monitor pressure locally.  Get precise, high-performance results from the world's leading pressure gauge supplier.

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


For pricing information:

Request a Quote
122 Series Data Sheet

Features

  • Stainless steel movement providing precision performance
  • 316L stainless steel wetted parts
  • Gauges welded in oxygen-free chambers to meet rigid cleanliness and safety guidelines
  • Variety of models and pressure ranges to support specific design needs

Benefits

  • Mechanical pressure gauges offer durable and efficient ways to monitor pressure locally

Applications

  • Gas delivery systems and tools used for semiconductor processing, including:
    • Bulk gas
    • Gas cabinets
    • Gas distribution
{0611827E-BDAA-489D-B1E4-90280E983F1C}
Product Type
Mechanical Pressure Gauges
{58EE102D-966D-40FB-847A-4CE8A05E0390}
Differentiator

High-Purity

{8C1D9CF4-A047-47E5-8B60-DCA9345494D4}
Performance
{BCE97E3A-6AB4-4FF9-AA3C-DE8806BC5A98}
Pressure Range

- 30" - 4000 psi

{D5E3CCA9-7DB7-4529-9166-4D98263C7B70}
Accuracy
1% Full Scale
{9BF3C762-3A99-476E-8803-5B5699122EDA}
Burst Pressure
400%
{3FDCA61E-85EA-41BA-B093-4E1BE6D8043D}
Proof Pressure
110%
{96AFF225-26AB-415C-B9DD-B3204F27C8F7}
Ratings
{0702E29E-FE1E-4AAA-9CCA-87C8CADD4615}
Safety Relief
Unrestricted rear blow-out plug
{F38B86EC-6DA4-400F-85C7-C2DD796D2180}
Helium Leak Check
4 x 10-9 Inboard Std. cc/sec
{9E1347BE-6B8B-4E22-8450-248E460C1061}
Cleanliness
Cleaned for oxygen service to ANSI B40.1 level IV specifications
{6DED59C7-53DC-4A73-86C1-5D4199D961C3}
Mechanical
{2CE03364-084A-4FAE-A477-74D832523BA3}
Housing
300 Series Stainless Steel, electropolished
{278E35B0-C665-4348-B821-7A4AD6F2999E}
Bezel & Lens Material
One-piece polycarbonate, screw-on
{CE3DA0D6-5A16-4487-89C1-649516DAC2DC}
Socket Material
316L Stainless Steel
{D19E13DD-8E08-4337-B30A-586282BCE0FC}
Movement

300 Series Stainless Steel

{A5558470-8BFF-42B5-B293-834A69FA1BC4}
Bourdon Tube
316L Stainless Steel
{AF45CDCD-7B72-41C9-A00D-3FFB5A402667}
Process Connections

Face-seal male, Face-seal swivel male,

Face-seal swivel female and 1/4" NPT male

{057116C4-C19C-4EB0-8FC9-120C57D0B2AC}
Dial
White with Black markings, "Use no Oil" is red
{C7C38FE5-5267-483D-9763-8BFD673565A7}
Surface Finish

Not Applicable

S122 C122 F122
Differentiator Socket Orientation Socket Orientation Socket Orientation
Pressure Range Vacuum - 4,000 psi Vacuum - 4,000 psi Vacuum - 4,000 psi
Accuracy 1% FS 1% FS 1% FS
Socket Orientation Stem Mounted

Center Back Mounted

Center Back Mounted with SS Front Flange

Filename File Type Documents By Language
Data Sheet pdf English