Brooks has unveiled the next era of its GF Series mass flow controllers. Our GF120 mass flow controllers now come with a Safe Delivery System (SDS®).
The GF120 SDS is a low-pressure drop mass flow controller that delivers sub-atmospheric SCS gases used in implant and etch processes. They are available in full-scale flow ranges of 4 to 25 sccm (GF120XSL) or >25 sccm to 1 slpm (GF120XSD).
Sub-atmospheric SCD gases are adsorbed onto a solid medium within the gas cylinder. They remain below atmospheric pressure despite containing up to 15 times more dopant than conventional pressurized sources. Most mass flow controllers need a 50 Torr differential pressure at flow rates of 5 sccm. But at that rate, only about 65 percent of the dopant can be extracted at normal operating temperatures.
The GF120 SDS' low-pressure operation enables 30 percent more of the dopant to be extracted. This increases cost savings in SDS gases and equipment.
For more information about the GF120 SDS, click here.