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Brooks Instrument Legacy Products

Mass Flow Controllers

Brooks 5850S Mass Flow Controller

5800S Series

Elastomer Sealed Thermal Mass Flow Controllers

Download Installation Manual

View Replacement Product

Brooks Control Valve 5835

Models 5835, 5836, 5837, 5838

Control Valves

Download Installation Manual
Brooks Model 5850TR

Model 5850TR

Elastomer Sealed Thermal Mass Flow Controllers

Download Installation Manual ±15 Vdc
Download Installation Manual ±24 Vdc

Replacement Products: SLA5800 or 4800 Series

Brooks Model 5816-Ex

Models 5816-EX, 5864-EX

Ex-Proof Mass Flow Controllers

Download Installation Manual
Brooks Instrument 9861 MFC

9861

High Temperature Mass Flow Controllers

Download Installation Manual
Brooks SLA5850 RevA mass flow meter

SLA5800 Series Revision A

Elastomer Sealed Thermal Mass Flow Controllers

Download Installation Manual
Download Data Sheet

View Replacement Product

Brooks MF Smart Series

MF Smart Series

Elastomer Sealed Thermal Mass Flow Controllers

Download Installation Manual

View Replacement Product

Brooks Instrument GF135 mass flow controller

GF135

Metal Sealed Thermal Mass Flow Controllers

Download Installation Manual

Variable Area Flow Meters (Rotameters)

1198 Series

Sight Flow Indicator

Download Installation Manual
Brooks 2001 variable area flow meter

2001 Series

Acrylic Tube Variable Area Flow Meters

Download Installation Manual

View Replacement Product

Brooks Full-View Glass Tube Flow Meter

Full-View® 1100 Series

Glass Tube Variable Area Flow Meters

Download Installation Manual
Download Data Sheet

View Replacement Product

Brooks Instrument GT1000

GT1000 Series

Glass Tube Variable Area Flow Meters

Download Installation Manual
Download Data Sheet

View Replacement Product

Brooks MT3602 variable area flow meter

MT3600 Series

Metal Tube Variable Area Flow Meters

Download Installation Manual
Download Data Sheet

View Replacement Options

Brooks MT3809E variable area flow meter

MT3809E Series

Metal Tube Variable Area Flow Meters

Download Installation Manual
Download Data Sheet

View Replacement Product

Brooks 1350E flow meter with valve

Sho-Rate Series 1350E/1355E

Glass Tube Variable Area Flow Meters

Download Installation Manual
Download Data Sheet

View Replacement Product

Pressure & Vacuum Products

Brooks 5866 metal sealed pressure controller

Model 5866M

Metal Sealed Pressure Controllers

Download Installation Manual

View Replacement Product

Brooks 8606, 8607 pressure regulator

Models 8606, 8607

Mechanical Pressure Regulators

Download Installation Manual
Brooks GCS404 cylinder scale

GCS400 Series

Cylinder Scales

Download Installation Manual
Brooks Instrument Pressure Switch

Models IPS122, IPT122

Pressure Switches & Transmitters

Installation & Operation Manual - IPS122
Installation & Operation Manual - IPT122

View Replacement Product

Brooks seal-free pressure transmitter

Models SFP32, SFP33

Seal-Free Pressure Transmitters

Download Installation Manual

Vaporization Products

Brooks direct liquid injection vaporizer plate system

Direct Liquid Injection (DLI) Vaporizers

Liquid Vaporizer Systems

Download Installation Manual
Download Data Sheet
Download Data Sheet - HV Series

Secondary Electronics & Software

software box icon

Brooks Service Suite (BSS)

Product Software

Download Quick Start Guide
Download Installation Manual
View Replacement Product
Models 0151E and 0151i Flow Computers

Models 0151E, 0151i

Flow Computers

Download Installation Manual
View Replacement Product
Brooks VR100 Single Channel Power Supply & Display Module

Model VR100

Power Supply and Display

Download Data Sheet