VDM300 DI Water Vapor Delivery Module

Highest flow accuracy for ultra-high purity deionized (DI) water vapor delivery.

Models VDM300

The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the highly accurate delivery of ultra-high purity deionized (DI) water vapor. It features a power efficient design that enables low temperature, ultra-high purity vapor generation. It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package.

Designed for advanced strip and post metal etch passivation processes, the VDM delivers improved accuracy, higher flow rates, wider control range and lower power consumption compared to flash evaporation systems. Based on proven thermal mass flow measurement techniques, the VDM produces vapor in a non-super-heated vapor state, reducing the aggressive effects of deionized water, for improved reliability and cleaner operation.

The VDM offers user-friendly data logging and diagnostic features via an independent service port and an intuitive graphic user interface.

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569

For pricing information:

Request a Quote

VDM300 Data Sheet

Features

Flow range: 3 slpm (DIW vapor)
Direct water vapor measurement with superior flow accuracy
Connects directly to the house deionized water supply
Operates at lower temperatures (non-superheated state)
Optimized design for flushing and draining
EtherCAT digital communications
Brooks Expert Support Tool (BEST) graphical user interface

Benefits

Utilizes proven, reliable thermal mass flow measurement and control technique
Highly tolerant of varying fab DI water supply pressure
Improved corrosion resistance in wetted path
Ensures cleaner operation
Tool interface using analog or digital communications
Direct user interface for enhanced data collection or troubleshooting

Applications

Silicon semiconductor post-metal etch process
Silicon semiconductor metal strip process
Ultra-high purity humidification in sub-atmospheric environments

Product Type

DI Water Vapor Delivery Module

Differentiator

Ultra High Purity DIW Vapor

Highest Flow Accuracy

Compact Design

EtherCAT interface

Vaporization Method

Vapor Draw

Fluid Type

UHP DI Water

Flow Range (Full Scale Capacity)

3000 sccm

Turndown Ratio

20:1

Response Time

<2 sec

Accuracy

±1% SP @ >10% FS

±0.2% FS @ 5 - 10% FS

Linearity

±0.5% of FS

Repeatability

<±0.2% FS

Flow Temperature Coefficient

0.05% per °C zero and span

Valve Shut Down

Normally Closed Valve: <0.5% FS

Electrical

Analog Communication

0 to 5-24 Vdc

Digital Communication

EtherCAT via dual RJ-45 jacks

Diagnostic (RS485) via microUSB

Electrical Connection

208-230 Vac, 50/60 Hz, 290 Watts Nominal (tank heater)

± 15 Vdc, ± 5% @ 1.2 amp (MFC heater and PCBA)

Status Lights

Zero

Device Ready

Warm Up

Device Fault

ECAT Error

EtherCAT Run

EtherCAT Link Active

Diagnostic / Service Port

RS-485 via microUSB

Fittings

Outlet Vapor: 1/2" Female VCR

Inlet DI Water: 1/4" Male VCR or Tube Compression

DI Water Drain: 1/8" Instant Tube Fitting

Mounting Orientation

Vertical with DIW inlet fittings down

Ratings

Max Pressure

Vapor Outlet: 200 torr

Supply Pressure

DI Water: 10 - 40 psig

N₂ Purge: 10 - 40 psig

Ambient Temperature Range

15 - 45°C

Internal Volume

0 to 95% RH, non-condensing

Compliance

EMC

Electromagnetic Compatibility (EMC): Fully Compliant to Directive 2004/108/EC (EN: 61326-1:2013)

Low Voltage Directive (LVD): Fully Compliant to Directive 2006/95/EC (EN: 61010-1:2010)

Environmental Compliance

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

SEMI E54.20-1108: Standard for Sensor/Actuator Network Communication for EtherCAT®

	VDM300
Flow Range (Full Scale Capacity)	3000 sccm (DIW Vapor)
Power Input	208-230 Vac, 50/60 Hz, 290 Watts nominal
Accuracy	±1% SP @ >10% FS ±0.2% FS @ 5 - 10% FS
Control Range	20:1
Supply Pressure	10 - 40 psig
Linearity	<0.5% of FS
Max Pressure	200 torr
Mounting Orientation	Vertical (inlet down)
Repeatability	<±0.2% FS
Response Time	<2 sec
Analog Communication	0 to 5-24 Vdc
Digital Communication	EtherCAT via dual RJ-45 jacks Diagnostics (RS-485) via microUSB

Filename	File Type	Documents By Language
VDM300-At-a-Glance	pdf	English Chinese
Data Sheet	pdf	English Japanese
Installation & Operation Manual	pdf	English
EtherCAT® Supplemental Manual - VDM300	pdf	English
CE EU Declaration of Conformity Certificate	pdf	English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: VDM3 - 1

Series	Inlet Fitting
VDM3	1 - 1/4” VCR Male
	2 - 1/4” Tube Compression

Filename	File Type
VDM3-1	STEP
VDM3-2	STEP

Brooks Expert Support Tool (BEST)

A Windows™ based application providing expanded control of Brooks Instrument MFCs and Pressure Controllers.

VDM300 DI Water Vapor Delivery Module

Questions?

For pricing information:

Features

Benefits

Applications

Global Headquarters

Questions?

Find a Sales Rep

Stay up to Date