VDM300 DI Water Vapor Delivery Module

Highest flow accuracy for ultra-high purity deionized (DI) water vapor delivery.
Models VDM300

The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the highly accurate delivery of ultra-high purity deionized (DI) water vapor. It features a power efficient design that enables low temperature, ultra-high purity vapor generation. It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package.

Designed for advanced strip and post metal etch passivation processes, the VDM delivers improved accuracy, higher flow rates, wider control range and lower power consumption compared to flash evaporation systems. Based on proven thermal mass flow measurement techniques, the VDM produces vapor in a non-super-heated vapor state, reducing the aggressive effects of deionized water, for improved reliability and cleaner operation.

The VDM offers user-friendly data logging and diagnostic features via an independent service port and an intuitive graphic user interface.

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VDM300 Data Sheet

Features

  • Flow range: 3 slpm (DIW vapor)
  • Direct water vapor measurement with superior flow accuracy
  • Connects directly to the house deionized water supply
  • Operates at lower temperatures (non-superheated state)
  • Optimized design for flushing and draining
  • EtherCAT digital communications
  • Brooks Expert Support Tool (BEST) graphical user interface

Benefits

  • Utilizes proven, reliable thermal mass flow measurement and control technique
  • Highly tolerant of varying fab DI water supply pressure
  • Improved corrosion resistance in wetted path
  • Ensures cleaner operation
  • Tool interface using analog or digital communications
  • Direct user interface for enhanced data collection or troubleshooting

Applications

  • Silicon semiconductor post-metal etch process
  • Silicon semiconductor metal strip process
  • Ultra-high purity humidification in sub-atmospheric environments
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Product Type

DI Water Vapor Delivery Module

 

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Differentiator

Ultra High Purity DIW Vapor

Highest Flow Accuracy

Compact Design

EtherCAT interface

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Vaporization Method
Vapor Draw
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Fluid Type
UHP DI Water
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Flow Range (Full Scale Capacity)

3000 sccm

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Turndown Ratio
20:1
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Response Time

<2 sec

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Accuracy

±1% SP @ >10% FS

±0.2% FS @ 5 - 10% FS

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Linearity
±0.5% of FS
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Repeatability
<±0.2% FS
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Flow Temperature Coefficient
0.05% per °C zero and span
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Valve Shut Down

Normally Closed Valve: <0.5% FS

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Electrical
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Analog Communication

0 to 5-24 Vdc

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Digital Communication

EtherCAT via dual RJ-45 jacks

Diagnostic (RS485) via  microUSB

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Electrical Connection

208-230 Vac, 50/60 Hz, 290 Watts Nominal (tank heater)

± 15 Vdc, ± 5% @ 1.2 amp (MFC heater and PCBA)

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Status Lights

Zero

Device Ready

Warm Up

Device Fault

ECAT Error

EtherCAT Run

EtherCAT Link Active

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Diagnostic / Service Port

RS-485 via microUSB

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Fittings

Outlet Vapor: 1/2" Female VCR

Inlet DI Water: 1/4" Male VCR or Tube Compression

DI Water Drain: 1/8" Instant Tube Fitting

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Mounting Orientation
Vertical with DIW inlet fittings down
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Ratings
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Max Pressure

Vapor Outlet: 200 torr

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Supply Pressure

DI Water: 10 - 40 psig

N2 Purge: 10 - 40 psig

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Ambient Temperature Range
15 - 45°C
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Internal Volume
0 to 95% RH, non-condensing
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Compliance
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EMC
Electromagnetic Compatibility (EMC): Fully Compliant to Directive 2004/108/EC (EN: 61326-1:2013)

Low Voltage Directive (LVD): Fully Compliant to Directive 2006/95/EC (EN: 61010-1:2010)

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Environmental Compliance

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

SEMI E54.20-1108: Standard for Sensor/Actuator Network Communication for EtherCAT®

VDM300
Flow Range (Full Scale Capacity)

3000 sccm (DIW Vapor)

Power Input 208-230 Vac, 50/60 Hz, 290 Watts nominal
Accuracy

±1% SP @ >10% FS

±0.2% FS @ 5 - 10% FS

Control Range 20:1
Supply Pressure 10 - 40 psig
Linearity <0.5% of FS
Max Pressure 200 torr
Mounting Orientation Vertical (inlet down)
Repeatability <±0.2% FS
Response Time

<2 sec

Analog Communication

0 to 5-24 Vdc

Digital Communication

EtherCAT via dual RJ-45 jacks

Diagnostics (RS-485) via microUSB

Filename File Type Documents By Language
VDM300-At-a-Glance pdf English Chinese
Data Sheet pdf English Japanese
Installation & Operation Manual pdf English
EtherCAT® Supplemental Manual - VDM300 pdf English
CE EU Declaration of Conformity Certificate pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: VDM3 - 1

Series
  Inlet Fitting
VDM3
  1 - 1/4” VCR Male
    2 - 1/4” Tube Compression

 

Filename File Type
VDM3-1 STEP
VDM3-2 STEP
Brooks Expert Support Tool (BEST)
A Windows™ based application providing expanded control of Brooks Instrument MFCs and Pressure Controllers.