{D432A024-FD6D-4D0D-8432-19B05A1CCA13}
{2C550224-B97F-4DE4-B757-EF5484427245}
{110069DA-4E2B-4345-B267-9E451F782B73}
{848E0FCF-F6B5-45DA-88CC-6862AE45D45F}
流量範囲（フルスケール容量）
3 sccm - 55 slm
{D553B057-B95A-4BA8-9193-1273F30CE5A7}
精度
±1% S.P. 35-100%
±0.35% F.S. < 5-35%
{6C1BC7DF-C09C-486E-960C-5D599253FB34}
{4ABE7CC0-99EB-4217-A4F9-64CF32C74B2F}
Linearity
±0.5% F.S. (included in accuracy)
{9DB4CDB8-E5AB-4ACB-8BC1-5E4315E62FC8}
レスポンスタイム
Normally Closed Valve: <1 sec
{9CF02FC0-2204-4093-88FA-52EBBDC7D623}
マルチガス マルチレンジ
MultiFlo™ Available
{0FA4C489-9A52-4D5B-B79A-E149517231C9}
{60D5A322-228A-4D87-B2C5-475F76D32510}
{F4356269-ACF9-40D4-BBA7-B2E226BA6D85}
Number of Bins
Standard GF Series: 11 bins
High Flow GF Series: 4 bins
{6E6C1666-A619-43CE-B88A-21ECF842967B}
Valve Shut Down
Standard GF Series: < 1% F.S.
High Flow GF Series: < 4% of Standard Configuration F.S. @ 30psig/atm out N2 equiv.
{A1267C6A-DE3B-4D99-AB81-A8C4C4359AC0}
Zero Stability
< ±0.5% F.S. per year
{235F1B79-9C09-4AD7-933A-5B843BCA46B2}
{5F8EF69E-B337-4B75-8382-2EECDB3CA850}
{CB49665F-45EB-4001-82D9-24B3458FE4B9}
{5E760402-0FC0-4473-B186-A2CCF304A696}
接液部材質
316 Stainless Steel
Hastelloy C-22
17-7 PH
430SS
KM-45
{470140BD-78B7-4A06-9B68-51132A02390A}
Valves
Normally Closed
Meter (no valve)
{919D73CA-704D-4514-BCCE-E50118E270B7}
{0B26914D-1709-4EAB-BAAD-91454FD8A3E6}
{43955F46-2780-4EF9-B145-8D3A2031409E}
差圧範囲
3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-50000 sccm = 25-45 psid
51-300 slm = 30-90 psid
(typical pressure drops)
{FD782E82-4D8E-4AAC-ADBA-1A58FE7B6E01}
最高圧力
Standard GF Series: 150 psig (10 bar)
High Flow GF Series: Meter = 75 psig (5 bar), Controller = 150 psig (10 bar)
{886AE7FF-B3BE-47C5-9962-81D5B4635CA1}
外部リークレート
1x10-10 atm cc/sec He
{4ABD037A-F4A5-4EEA-9219-7054E013756F}
{121E5169-A858-436C-8DFA-A93D50333F66}
{1966DF4C-7899-43C1-B47B-0D1443DEF920}
Status Lights
MFC Health, Network Status
{C236791C-5D40-451A-8332-37F5BA6B3E6E}
警報
Control Valve Output, Network Interruption
{4052899F-02FF-442F-8AF6-ADA42B2EEF9B}
Diagnostic - Service Port
RS485 via 2.5mm jack (all models)
{3FC1A843-1F8D-486C-95D5-28BC775C2157}
{A6BF0885-99D5-4124-9666-990B6364074E}
アナログ通信
0-20 mA
4-20 mA
0-5 Vdc
0-10 Vdc
{E602561E-72AC-4165-A244-E0DBFE3D5C3D}
デジタル通信
DeviceNet™
Profibus®
RS485 S-Protocol
RS485 L-Protocol
RS485 A-Protocol (GF081)
{D31228BC-D47E-41C3-A90C-0B9804D06221}
電気接続
Profibus/Analog via 9-Pin "D" connector
RS485/Analog via 9-Pin"D" connector, 15-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
{931D6DC4-DF29-4BEC-AA66-1B27BF9836BD}
電源 / 消費電力
Standard GF Series: RS485 from +12 Vdc to +24 Vdc = 7 Watts max
Profibus from +13.5 Vdc to +27 Vdc = 7 Watts max
DeviceNet™ from +11 Vdc to +25 Vdc = 13.6 Watts max
High Flow GF Series: RS485 from +12 Vdc to +24 Vdc = 3.3 Watts max
Profibus from +13.5 Vdc to +27 Vdc = 3.3 Watts max
DeviceNet™ from +11 Vdc to +25 Vdc = 3.3 Watts max
{5A9ACE4D-CF92-4B8C-A128-2331B6DA4BE6}
{8D98D6AF-A0E4-4137-83E9-1B71CC1C283E}
電磁環境適合性
CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
{9BABA9A5-4BE9-4EE6-AAD6-8F0E1661B294}