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差別化要因
High Purity/Ultra-High Purity
Standard GF Series
High Flow GF Series
Ultra-Fast Response Time
Pressure Transient Insensitivity
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流量範囲（フルスケール容量）
Standard GF Series: 3 sccm - 55 slpm
High Flow GF Series: 55 slpm - 300 slpm
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精度
±1% S.P. > 35-100%
±0.35% F.S. 2-35%
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Linearity
±0.5% F.S. (included in accuracy)
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レスポンスタイム
Normally Closed Valve:
300 ms - < 700 ms
700 ms - < 1 sec
SDS Gas Delivery: < 3 sec
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Response Time - NO
Normally Open Valve: <1.5 sec (specific models)
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マルチガス マルチレンジ
MultiFlo™ Standard (most models)
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供給圧力変動耐性/背圧変動耐性 (安定時)
<5% S.P. for up to 5 psi/sec upstream press. spike
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Control Range
Standard GF Series: < 3-100%
High Flow GF Series: 5-100%
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Number of Bins
Standard GF Series: 11 bins
High-Flow GF Series: 4 bins
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Valve Shut Down
Standard GF Series: < 1% F.S.
High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out
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Zero Stability
< ±0.5% F.S. per year
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Temperature Coefficient
Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C
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接液部材質
SEMI F20 HP/UHP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45
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Valves
Normally Closed
Normally Open (specific models only)
Meter (no valve)
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差圧範囲
3-860 sccm = 7-45 psid
861-7200 sccm = 10-45 psid
7201-55000 sccm = 15-45 psid
51 slm-300 slm = 30-90 psid
*Typical pressure drops. Contact Brooks Technical Support for more information.
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最高圧力
Standard GF Series: 500 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)
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外部リークレート
1x10-10 atm cc/sec He
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Status Lights
MFC Health
Network Status
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警報
Control Valve Output
Network Interruption
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Diagnostic - Service Port
RS-485 via 2.5mm jack (all models)
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Display
Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)
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デジタル通信
DeviceNet™
RS485 L-Protocol
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電気接続
Analog/RS485 via 9-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
Various cable adaptors available. See product data sheet for more information.
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電源 / 消費電力
Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)
DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc
(Under typical operating conditions)
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電磁環境適合性
EC Directive 2004/108/EC
CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
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環境法令遵守
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006