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製品タイプ
Mass Flow Controller
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差別化要因
Ultra-fast Response Times
Optional Local Operator Interface
Compact Size
Suitable for Non-corrosive Gases
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{C496FBC9-FE7D-4482-86F7-2A8FCADFFCE9}
流量範囲（フルスケール容量）
50 sccm - 40 slpm
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精度
3.0% of FS
1.0% of FS (optional)
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レスポンスタイム
Normally Closed Valve: 300 ms - <1 sec
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差圧範囲
3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-55000 sccm = 25-45 psid
*Contact Brooks Technical Support for more information.
{9F7B84C0-6CCE-401E-B020-309EE5B3462F}
外部リークレート
1x10-10 atm cc/sec He
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{B4F8528F-91B9-455E-A539-BE8E49C74F3A}
接液部材質
316 Stainless Steel, Hastelloy C-22, 1707 PH,43055
{CF205FFF-4E15-4866-AEA6-F9267ABD04DD}
{E8543896-D4FA-454F-8B5B-82A8715652F4}
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Input and Output
0-5 Vdc,
4-20 mA, RS-232 (Standard with all analog I/O options)
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電気接続
Two 15-pin D-sub connectors
- One for connection to the 4800 Series
- One for the remote connection
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Local Operator Interface
P/N: 273L156ZZZ
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Display Area
28mm wide x 11mm high
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Humidity
5 - 95% RH (ambient)
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Power Adaptor
P/N: 641Z059AAA
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Power Requirements
The LOI optionally includes a wall mount power adaptor with a 3.5-mm DC-plug. The adaptor works with input voltages of AC 90-240 V/47-63Hz. The adaptor supports European, U.K., Australia and U.S. wall plugs. Power can also be supplied by a remote connection via the D-connector.
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電磁環境適合性
EMC Directive 2004/108/EC: per EN 61326:2006
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認定 / 承認
ATEX Zone 2
CSA Div 2/Zone 2 (Recognized)
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環境法令遵守
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
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