5866RT エラストマシールプレッシャーコントローラ/フローメータ

Pressure Controller & Flow Meter

Remote Transducer

Pressure Control & Flow Measurement

Any range 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.

Flow Accuracy:

 ±1% F.S. including linearity at the calibration conditions

±1.5% F.S. for flow rates greater than 20 slm

±0.25% of rate

0.1% F.S. per °C

100:1 for a remote transducer with a 0-10 V output

Pressure Response Time:

< 0.8 sec typical for a 0-100% command step with <2% pressure overshoot.

Actual pressure response depends on system design.

Inboard to Outboard

メタルシール: 1 x 10^-10 atm cc/sec He max 

エラストマシール: 1 x 10^-9 atm cc/sec He max

Wetted Parts: Standard 316L/316L VAR Stainless Steel

Valve Seat: Standard Viton^® fluoroelastomers or metal

External/Internal Seals: flouroelastomers or metal

Optional: Buna-N, Teflon^® or Kalrez^®

Normally Closed

Normally Open

No Valve (elastomer, upstream configuration only)

0-5 V

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15-Pin "D" Connector

Normally Closed: 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA

Normally Open: 10.5 watts; ±15 Vdc (±5%) @ 350 mA

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EMC Directive 89/336/EEC EN 61326-1

Compact